Hamamatsu-photonics K.k.

Gretag-macbeth Ag

Centre Suisse D'electronique Et De

M Squared Technology Limited

Hamamatsu Photonics Kabushiki Kaisha

Helmut Teichmann

Katsumi Shibayama

Dietmar Hiller

Ulrich Starker

Tomofumi Suzuki

Takafumi Yokino

Masashi Ito

Takashi Kasahara

Peter Seitz

Andreas Durandi

Seiichiro Mizuno

Takashi Iida

Mitsuaki Kageyama

Seiichiro c/o Hamamatsu Photonics KK Mizuno

Katsumi c/o Hamamatsu Photonics KK Shibayama

Mitsuaki c/o Hamamatsu Photonics KK Kageyama

Provided is a control device for controlling a Fabry-Perot interference filter having a pair of mirror parts and a pair of driving electrodes. The control device includes: a first driving source that is controlled by using a current as a control parameter, and changes the distance between the pair of mirror parts; a second driving source that is controlled by using a voltage as a control parameter, and changes the distance; and a control unit that controls the first driving source and the second driving source in such a way that the distance is changed by a first driving source in a first region and the distance is changed by the second driving source in at least one part of an region other than the first region when an region including a maximum of the voltage is defined as the first region.

Control device, optical filter system, and control method

Provided is a monitor device used with a Fabry-Perot interference filter having a pair of mirror parts and a pair of driving electrodes, and having a distance between the mirror parts changed in accordance with charges stored between the driving electrodes. The monitor device includes: a current application unit that applies an AC current having a frequency higher than a resonant frequency of the mirror parts across the driving electrodes; a voltage detection unit that detects a temporal development of a voltage generated between the driving electrodes during application of the AC current; a control unit that controls the AC current across the driving electrodes, based on an evaluation of a DC component of the voltage detected by the voltage detection unit; and a monitor unit that monitors the distance between the mirror parts based on an AC component of the voltage detected by the voltage detection unit.

Monitoring device, optical filter system, monitoring method, and current generation device

An optical filter system includes a Fabry-Perot interference filter, and a controller that controls the Fabry-Perot interference filter. The Fabry-Perot interference filter includes a first mirror portion, a second mirror portion, a first driving electrode and a first monitor electrode provided with the first mirror portion, and a second driving electrode and a second monitor electrode provided with the second mirror portion. The controller includes a control unit that calculates an electrostatic capacitance between the first mirror portion and the second mirror portion based on an alternating voltage generated between the first monitor electrode and the second monitor electrode while an alternating current is applied between the first monitor electrode and the second monitor electrode.

Optical filter system

In the spectroscopy module, a light detecting elementis provided with a light passing openingthrough which light made incident into a body portionpasses. Therefore, it is possible to prevent deviation of the relative positional relationship between the light passing openingand a light detection portionof the light detecting element. Further, an optical element, which guides light made incident into the body portion, is arranged at the light passing opening. Therefore, light, which is to be made incident into the body portion, is not partially blocked at a light incident edge portion of the light passing opening, but light, which is to be made incident into the body portion, can be guided securely. Therefore, according to the spectroscopy module, it is possible to improve the reliability.

Spectroscopic module

A photodiode array, having a plurality of photodiodes(n-type channel regions), and a light entrance portion, formed of an opening that is used to make light to be detected by photodiodesenter, are provided in a substrateof a photodetectorA having an n-type substrateand a p-type epitaxial layer. Furthermore, a carrier capturing portion, for capturing carriers generated at a substrate portion near the light entrance portionand removes the captured carriers to the exterior via an electrode, is arranged from a layer portion of the epitaxial layerthat is positioned between the photodiode arrayand the light entrance portion. A photodetector of a simple arrangement, which, when applied to a spectrometer, enables the positioning precision of components of the spectrometer to be improved, and a spectrometer using this photodetector are thus realized.

Photodetector and spectrometer using the same

The spectroscopy moduleis provided with a body portionfor transmitting light L, L, a spectroscopic portionfor dispersing light Lmade incident from the front planeof the body portioninto the body portionto reflect the light on the front plane, a light detecting elementhaving a light detecting portionfor detecting the light Ldispersed and reflected by the spectroscopic portionand electrically connected to a wiringformed on the front planeof the body portionby face-down bonding, and an underfill materialfilled in the body portionside of the light detecting elementto transmit the light L, L. The light detecting elementis provided with a light-passing holethrough which the light Ladvancing into the spectroscopic portionpasses, and a light incident openingof the light-passing holeis partially covered by a light transmitting plate

In the spectroscopy module, a light absorbing layerhaving a light-passing holethrough which light Ladvancing into a spectroscopic portionpasses and a light-passing holethrough which light Ladvancing into a light detecting portionof a light detecting elementpasses is integrally formed by patterning. Therefore, it is possible to prevent deviation of the relative positional relationship between the light-passing holeand the light-passing hole. Further, since the occurrence of stray light is suppressed by the light absorbing layerand the stray light is absorbed, the light detecting portionof the light detecting elementcan be suppressed from being made incident. Therefore, according to the spectroscopy module, it is possible to improve the reliability.

The spectroscopy moduleis provided with a body portionfor transmitting light L, L, a spectroscopic portionfor dispersing light Lmade incident from the front planeof the body portioninto the body portionto reflect the light on the front plane, a light detecting elementhaving a light detecting portionfor detecting the light Ldispersed and reflected by the spectroscopic portionand electrically connected to a wiringformed on the front planeof the body portionby face-down bonding, and an underfill materialfilled in the body portionside of to the light detecting elementto transmit the light L, L

The spectroscopy module is provided with a body portion for transmitting light, a spectroscopic portion for dispersing light made incident from the front plane of the body portion into the body portion to reflect the light on the front plane, a light detecting element having a light detecting portion for detecting the light dispersed and reflected by the spectroscopic portion and electrically connected to a wiring formed on the front plane of the body portion by face-down bonding, and an underfill material filled in the body portion side of the light detecting element to transmit the light. The light detecting element is provided with a light-passing hole through which the light advancing into the spectroscopic portion passes, and a reservoir portion is formed on a rear plane of the body portion side in the light detecting element so as to enclose a light outgoing opening of the light-passing hole.

Since a spectroscopic module () has a plate-shaped body section (), the spectroscopic module can be reduced in size by reducing the thickness of the body section (). Moreover, since the body section () is plate-shaped, the spectroscopic module () can be manufactured, for example, by using a wafer process. More specifically, by providing lens sections (), diffraction layers (), reflection layers () and light detecting elements () in a matrix form on a glass wafer which becomes many body sections () and dicing the glass wafer, many spectroscopic modules () can be manufactured. This enables easy mass production of spectroscopic modules ().

Alignment marks, andare formed on the flat planeof the peripheral edge portionformed integrally with the diffracting layer, and when the lens portionis mounted onto the substrate, these alignment marksandare positioned to the substrate, thereby making exact alignment of the diffracting layerwith respect to the light detecting portionof the light detecting element, for example, not by depending on a difference in curvature radius of the lens portion. In particular, the alignment marksandare formed on the flat plane, thereby image recognition is given to exactly detect positions of the alignment marksand, thus making it possible to make exact alignment.

Spectroscopy module

Alignment marks, andare formed on the flat plane 11of the peripheral edge portionformed integrally with the diffracting layer, and when the lens portionis mounted onto the substrate, these alignment marksandare positioned to the substrate, thereby making exact alignment of the diffracting layerwith respect to the light detecting portionof the light detecting element, for example, not by depending on a difference in curvature radius of the lens portion. In particular, the alignment marksandare formed on the flat plane, thereby image recognition is given to exactly detect positions of the alignment marksand, thus making it possible to make exact alignment.

A spectrometerA is made up of: an optical bodywithin which a light separation path is set along which an object light to be separated propagates; a light entry slitthrough which the object light enters; a diffraction gratingfor spectrally separating the incident object light; and a photodiode arrayfor detecting the object light separated by the diffraction grating. As an optical member for optically interconnecting the optical bodyand the photodiode array, an optical connection memberis provided, with its light entry surfacefor the separated object light in contact with the upper surfaceof the optical body, with its light exit surfacein contact with the photodiode array, with the light exit surfacetilted by a specified angle relative to the light entry surface. Thus, the spectrometer capable of bringing about sufficient accuracy of placing optical elements in a simple constitution while bringing down cost is realized.

Spectrometer

A spectrometer is configured by using a photodetectorB which comprises a semiconductor substratehaving an upper surface, a photodiode arrayhaving a plurality of photodiodesaligned on the upper surfaceof the substrate, and a light input sectionincluding an opening formed in a predetermined positional relationship to the photodiode array; and a main bodyhaving a plate portionand support portionsandmounted on the substrateof the photodetectorB. The spectrometer is provided with a lensprotruded from a lower faceof the plate portionand a planar aberration-reduced blazed reflection diffraction gratingprovided on an upper faceof the plate portionfor separating incident light having entered through the light input sectionand passed through the lensinto its spectral components, and configured to detect the spectral components with the photodiode array. Thus, a photodetector capable of improving the positioning accuracy of components when it is applied to a spectrometer and the spectrometer using the same are realized.

Growing community of inventors

Zurich, Switzerland

Helmut Teichmann