Steag Rtp Systems Gmbh

Mattson Thermal Products Gmbh

Steag Ast

Ast Elektronik Gmbh

Helmut Sommer

Zsolt Nenyei

Guenter Kaltenbrunner

Wilfried Lerch

Georg Roters

Roland Mader

Manuela Zwissler

Genrih Erlikh

Yehuda Pashut

Herbert Kegel

The aim of the invention is the simple and economical production of a hydrogen-rich process gas from water vapour and hydrogen, whereby the proportion of water vapour to hydrogen may be precisely controllable and reproducible. Said aim is achieved, with a method and device for the production of a process gas for the treatment of substrates, in particular semiconductor substrates, in which the oxygen for formation of a process gas, comprising water vapour and hydrogen, is burnt in a hydrogen-rich environment in a combustion chamber.

Method and apparatus for the production of process gas that includes water vapor and hydrogen formed by burning oxygen in a hydrogen-rich environment

A method of rapid thermal processing (RTP) of a silicon substrate is presented, where a very low partial pressure of reactive gas is used to control etching and growth of oxides on the silicon surface.

Method for rapid thermal processing (RTP) of silicon substrates

A plurality of substrates is closely stacked together in a Rapid Thermal Processing (RTP) chamber, and the stack is processed simultaneously.

Apparatus and method for rapid thermal processing (RTP) of a plurality

A closable enclosure for rapid thermal processing of semiconductor wafers is presented, wherein the closable enclosure has an enclosed volume less than 10 times the volume of the wafer, and wherein the closable enclosure may be closed about the wafer while the closable enclosure is surrounded by the process gas.

Apparatus and method for rapid thermal processing

A closable enclosure for rapid thermal processing of semiconductor wafers is presented, wherein the closable enclosure has an enclosed volume less than 10 times the volume of the wafer, and wherein the closable enclosure may closed about the wafer while the closable enclosure is surrounded by the process gas.

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Deggingen, Germany

Helmut Sommer