Robert Boschgmbh

Helmut Skapa

Michael Offenberg

Horst Muenzel

Heinz-Georg Vossenberg

Markus Lutz

Franz Laermer

Klaus Heyers

Eckhard Graf

Bernhard Elsner

Peter Hein

Martin Schoefthaler

Horst Munzel

Nicholas Buchan

A method for manufacturing micromechanical components, and a micromechanical component, in which a movable element is produced on a sacrificial layer. In a subsequent step the sacrificial layer beneath the movable element is removed so that the movable element becomes movable. After removal of the sacrificial layer, a protective layer is deposited on a surface of the movable element. Silicon oxide and/or silicon nitride is used for the protective layer.

Nonstick layer for a micromechanical component

A method for fabricating a micromechanical component, in particular a surface-micromechanical acceleration sensor, involves preparing a substrate and providing an insulation layer on the substrate, in which a patterned circuit trace layer is buried. A conductive layer, including a first region and a second region, is provided on the insulation layer, and a movable element is configured in the first region by forming a first plurality of trenches and by using an etching agent to remove at least one portion of the insulation layer from underneath the conductive layer. A contact element is formed and electrically connected to the circuit trace layer in the second region by configuring a second plurality of trenches, and the resultant movable element is encapsulated in the first region. The second plurality of trenches for forming the contact element in the second region is first formed after the encapsulation of the movable element formed in the first region.

Method for fabricating a micromechanical component

Method of producing acceleration sensors

Growing community of inventors

Reutlingen, Germany

Helmut Skapa