Balzers Hochvakuum Ag

Helmut Schoch

Johannes Edlinger

Reinhard Sperger

A first coating layer structure,is produced by coating, alignment, exposure and development. On this coating layer structure,is deposited the first colour filter layer system,. Over the entire colour filter layer system,is deposited a sacrificial layer,Outside the vacuum container the coating layer structure is dissolved and with it the colour filter layer system regions,are removed. A further process of coating, alignment, exposure and development is carried out to create a coating layer structure,. Next the second colour filter layer system,and the second sacrificial layer,are deposited. Thereby the sacrificial layer,withstands the step of dissolving the coating and can be removed finally without damaging the colour filter layer system regions. Accordingly, any flakes,remaining from the lift-off are removed with the sacrificial layer

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Feldkirch, Austria

Helmut Schoch