Balzers Aktiengesellschaft

Oerlikon Surface Solutions Ag, Pfaffikon

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Artificial Sensing Instruments Asi Ag

Unaxis Balzers Aktinegesellschaft

Balzers Aktiengsellschaft

Oerlikon Trading Ag, Trubbach

Helmut Rudigier

Johannes Edlinger

Walter Haag

Klaus Wellerdieck

Hans Signer

Reinhard Sperger

Eduard Kugler

Beno Widrig

Mirjam Arndt

Hamid Bolvardi

Jochen Schneider

Siegfried Krassnitzer

Jürgen Ramm

Erich Bergmann

Juergen Ramm

Kurt Tiefenthaler

Othmar Zueger

Paul Heinz Mayrhofer

Peter Wierer

Eduard Kügler

Alois Zetting

Richard Rachbauer

Peter Marbach

Francois Legay

Roland Pfefferkorn

Konda Gokuldoss Pradeep

Eduard K{umlaut Over (u)}gler

Lin Shang

Eduard K&uuml;gler

Helmut Schoech

Troy Vom Braucke

Jakob Stock

Peter End

Veronique Briquet

Wolfgang Markus Seidl

The invention relates to a HiPIMS method by means of which homogeneous layers can be deposited over the height of a coating chamber. Two partial cathodes are used for said purpose. According to the invention, the length of the individual power pulse intervals applied to the partial cathodes is chosen individually and thus a required coating thickness profile over the height of the coating chamber is achieved.

Homogeneous HiPIMS coating method

Component surfaces are coated with thermally stable layers. In particular infrared mirror surfaces or surfaces of combustion chambers are coated with at least one layer consisting of thermally stable Al&#x2014;Cr&#x2014;O in such a manner that the absorption, reflection or transmission of infrared radiations (hereinafter also called thermal radiations) is influenced.

Infrared mirror with a thermally stable layer

The present disclosure relates to a coated substrate with a coating deposited on at least a part of the substrate surface, said coating comprising at least one metal boron carbide layer, characterized in that the metal boron carbide layer is a ternary compound exhibiting a polycrystalline structure formed of a single phase of hafnium, boron and carbon. Further a method for deposition of such a coating is provided.

Coating material comprising a ternary phase of Hf&#x2014;B&#x2014;C

The invention relates to a method for coating work pieces in a vacuum treatment system having a first electrode embodied as a target, which is part of an arc vaporization source. Using the first electrode, an arc is operated with an arc current and vaporizes material. A bias voltage is applied to a bias electrode, which includes a second electrode that is embodied as a work piece holder, together with the work pieces. Metal ion bombardment is carried out either to pretreat the work pieces or in at least one transition from one layer to an adjacent layer of a multilayer system, so that neither a significant material removal nor a significant material buildup occurs, but instead, introduces metal ions into a substrate surface or into a layer of a multilayer system.

Method for pretreating substrates for PVD methods

The invention relates to a PVD process for coating a substrate with a layer containing at least one microcrystalline metallic borocarbide phase. During the PVD process, the source output is pulsed such that the at least one peak of which the half intensity width allows conclusions to be drawn about the presence of a microcrystalline phase of the metallic borocarbide layer can be identified in the x-ray spectrum of a layer produced in this way at a substrate temperature below 600&#xb0; C.

Method for manufacturing a metal-borocarbide layer on a substrate

An optical waveguide has a substrate with a surface of organic material, an inorganic material waveguide layer along the surface of organic material with a waveguide layer surface pointing toward the surface of organic material and an organic/inorganic material interface between the surface of organic material and the waveguide layer surface. The organic/inorganic interface is remote from the waveguide layer surface and is formed by the surface of organic material and a surface of an intermediate spacer system of inorganic material. The spacer system substantially preventing the material interface from being subjected to light energy of light guided in the waveguide layer.

Waveguide and process for the production thereof

A switch for the optical switching of a light path, particularly for switching the entering of light into a fiber-optical light guide is provided. The switch dial has at least one mirror surface for reflecting the light and, for establishing the mirror surface, a support is equipped with a reflective layer, which support is constructed as a glass body.

Switch for the optical switching of a light path

A method of manufacturing an object in a vacuum treatment apparatus having a vacuum recipient for containing an atmosphere, includes the steps of supporting a substrate on a work piece carrier arrangement in the recipient and treating the substrate to manufacture the object in the vacuum recipient. The treating process includes generating electrical charge carriers in the atmosphere and in the recipient which are of the type that form electrically insulating material and providing at least two electroconductive surfaces in the recipient. Power, such as a DC signal, is supplied to at least one of the electroconductive surfaces so that at least one of the electroconductive surfaces receives the electrically insulating material for covering at least part of that electroconductive surface. This causes electrical isolation of that electroconductive surface which leads to arcing and damage to the object. A control signal is applied to the electroconductive surfaces during repeating and alternating first time spans and second time spans, for prevent arcing at the part of the electroconductive surfaces which is, or is becoming electrically isolated from the atmosphere by being covered by the electrical charge carriers.

Method of manufacturing an object in a vacuum recipient

A method for manufacturing an optical waveguide includes shaping a substrate of organic material, applying at least one intermediate layer by a first vacuum coating process onto the substrate and applying a waveguide layer by means of a second vacuum coated process onto the intermediate layer. The at least one intermediate layer is applied so that only a negligible part of light energy reaches an interface surface between the intermediate layer and the substrate.

Proposed is a waveguide which is formed on a substrate ( ) of a polymer. For that purpose, provided between the substrate ( ) and the waveguide layer ( ) is an intermediate layer ( ) of an inorganic material which prevents a substantial amount of energy from penetrating into the relatively highly absorbent polymer material. That minimizes the waveguide losses.

Waveguide and the process for production thereof

A method for producing a layer of a metal oxide with optical losses of 15 dB/cm, at most, for light with a wavelength of 633 nm, includes depositing the layer using magnetic field enhanced reactive DC-sputtering, from a metallic target.

Optical film material especially TiO2 or Ta2O5 optical waveguide layer and method for producing such

A dielectric interference filter system with at least filter elements of different spectral characteristics on the same carrier substrate is provided. The filter elements have the same height and/or adjoin each other without gaps. The system is used for, inter alia, interference color filter systems in the form of an LCD-display or CCD-arrangement. A process for manufacturing the system includes preparing at least one filter element by coating and subsequent etching, and preparing at least one subsequent filter element by coating and subsequent structuring utilizing lift-off in which the etching mask is used as the lift-off mask.

Dielectric interference filter system, LCD-display and CCD-arrangement as well as process for manufacturing a dielectric interference filter system and use of this process

A vacuum treatment apparatus (FIG. 13) includes a vacuum recipient or chamber (3) for containing an atmosphere. A mechanism (50,52) for generating electrical charge carriers in the atmosphere is provided in the recipient, the electrical charge carriers being of the type that form electrically isolating material. The recipient also contains a work piece carrier arrangement (1) and at least two electroconductive surfaces (2a, 2b) which are mutually electrically isolated from each other. A DC power supply (8) is operationally connected to the electroconductive surfaces by respective electrical conductors with an inductor (L.sub.66) in one of the conductors. A parallel switching arrangement is connected between the electrical conductors to control a current path between the conductors.

Vacuum treatment apparatus

A vacuum treatment apparatus eliminate arcing in a vacuum recipient for containing an atmosphere and having a mechanism for generating electrical charge carriers in the atmosphere. A workpiece carrier arrangement and at least two electro-conductive surfaces are in the recipient and a generator unit having an output is connected to the electro-conductive surfaces. The generator includes a DC generator with an output, and a controlled adjusting unit with an input connected to the output of the DC generator. The controlled adjusting unit generates a first output signal in dependency on an output signal of the DC generator during first timespans, and a second output signal during second timespans. The unit may also have a time-controlled discharge or charge current loop connected from one of the electro-conductive surfaces to the other, with a higher ohmic resistance during the first timespans and a lower ohmic resistance during the second timespans.

Method of controlling a treatment process and vacuum treatment apparatus

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Bad Ragaz, Switzerland

Helmut Rudigier