Average Co-Inventor Count = 4.80
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Steag Ast (2 from 6 patents)
2 patents:
1. 5965047 - Rapid thermal processing (RTP) system with rotating substrate
2. 5870526 - Inflatable elastomeric element for rapid thermal processing (RTP) system