Leybold-heraeus Gmbh

Leybold Systems Gmbh

Leybold Aktiengesellschaft

Helmut Eberhardt

Volker Bauer

Albert Feuerstein

Alfred Rick

Helmut Lammermann

Klaus Michael

Friedrich Anderle

J&ouml;rg Krempel-Hesse

Martin Bahr

Gerald Lobig

Gerard Lobig

An apparatus is disclosed for the coating of substrates (,) with thin films, having a vacuum chamber (,), a target (,) to be atomized, situated opposite the substrate (,) in the vacuum chamber (,), with magnets (,) to produce a magnetic tunnel in front of the area of the target (,) to be atomized, an inlet (,) for a process gas into the process space (,), an anode (,), which is electrically insulated with respect to the vacuum chamber (,), and a current-voltage supply to produce a plasma in front of the target (,). The target (,) is shaped as a rotation-symmetrical body, which provides a ring-shaped enclosure around the substrate (,), wherein the magnets (,&prime;, . . . ) are supported on the side of the hollow cylindrical target (,), facing away from the substrate (,), and can move around the rotational axis (R) of the target (,). The substrate (,) is electrically insulated, with respect to the vacuum chamber (,), and a part of an insulator (,), configuring the anode (,), is supported on the bottom of the process space (,).

Apparatus for the coating of substrates in a vacuum chamber

A vacuum coating device coats substrates on all sides by rotating the substrates in a material flow. The device is for use in a vacuum chamber with a material source, and includes a holder for holding the substrates opposite the material source and drives correlated with the holder to bring about a rotation and shifting movement of the substrates. The device includes a hollow manipulator arm formed from three legs which extend at an angle with respect to one another. More specifically, the first leg extends at an obtuse angle with respect to the second leg, and the second leg extends at an approximately right-angle with respect to the third leg. The substrates are then held at the end of the third leg by the holder. The manipulator arm, when driven by a motor, can rotate around the longitudinal axis of the first leg, and, moreover, can move back and forth in the direction of this longitudinal axis. The holder includes a planetary gear system and substrate holders, which are made to rotate by the planetary gear system.

Vacuum coating device for coating substrates on all sides

A bevel angle drive having an input shaft with a plurality of first gears disposed at intervals thereon and a plurality of output shafts driven through second gears by the first gears and disposed radially to the input shaft. Each of the first gears has a hollow shaft. The output shafts with the second gears in the form of bevel gears are mounted each in a drive casing in which the particular first gear is journaled. The input shaft is brought in a longitudinally displaceable manner through each hollow shaft of all first gears and is joined for co-rotation to the letter by means of a driver.

Bevel gear drive

An apparatus for producing and coiling films of insulating material coated under a vacuum with electrically conductive material, comprising an electron beam vaporizer, a feed drum, a roller disposed above the electron beam vaporizer and looped by the film, a take-up drum, and deflector rolls for establishing a path for the film, at least one plasma source oriented towards the path of the film so that the plasma touches the film, said plasma source being disposed in the region of the path of the film from the electron beam vaporizer to the take-up drum, wherein the plasma source is disposed at the end of the angle of contact specified by one of the deflector rolls.

Apparatus for producing coils from films of insulating material,

A method and apparatus are disclosed for producing rolls or coils of film of insulating material which has been conductively coated, in a vacuum, by vaporizing conductive material in direct electron beam bombardment and condensing the vapor on the film surface. According to the invention, the film is subjected to a plasma treatment after coating and before the film is wound in a coil.

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Grundau, Germany

Helmut Eberhardt