Dalian University of Technology

Zhuhai Seine Technology Co., Ltd.

Helin Zou

Xiaokun Chen

Yue Li

Jingzhi He

Yi Zhou

Sha Sun

Shuai Gao

A liquid jet head manufacturing method, a method for integrally manufacturing a liquid jet apparatus, a liquid jet head, a printing apparatus and a liquid jet apparatus. The manufacturing method includes: forming multiple pressure-generating members arranged spaced apart on a first substrate; forming, on a first surface of first substrate, pressure chambers corresponding to multiple pressure-generating members, and a common chamber in communication with multiple pressure chambers; forming a transition layer on pressure chambers, and forming a jet orifice plate on transition layer; and forming, on jet orifice plate and transition layer, jet orifices in communication with pressure chambers. When the number of pressure chambers needs to be increased, since pressure chambers are formed on first substrate individually, mechanical strength of first substrate will not be reduced, and during manufacturing process, breakage of first substrate can be avoided, improving yield of liquid jet head, and reducing manufacturing cost.

Liquid jet head, method for integrally manufacturing a liquid jet apparatus, and device

Provided are a method for manufacturing an ink jet head and an ink jet head. The method includes: arranging a vibrating plate on lower surface of a substrate; arranging a piezoelectric actuator on surface of the vibrating plate; arranging a protective film on surface of the piezoelectric actuator for sealing the piezoelectric actuator along with the vibrating plate, thus preventing the piezoelectric actuator from corrosion; etching the substrate and the vibrating plate to form a groove on the substrate at a position corresponding to the piezoelectric actuator, and form a liquid feeding hole on the substrate and vibrating plate; forming a pressure chamber and a nozzle orifice on lower surface of the vibrating plate, allowing the pressure chamber to cover the position where the piezoelectric actuator is arranged in the vibrating plate, enabling communication of the pressure chamber with the nozzle orifice and the liquid feeding hole.

Method for manufacturing ink jet head

The present invention relates to the field of micro electro mechanical system (MEMS), and particularly relates to a MEMS device of a two-dimensional (2D) air amplifier for electro spray ion focusing. It mainly includes original gas inlets, a gap structure, a wall structure and a center focusing groove in the axis of air amplifier. The feature of present invention is the double layers SU-8 mold fabricated by a micro machining method. Then the polydimethylsiloxane (PDMS) air amplifier is cast and bonded. In order to enhance the structure stiffness, PDMS is bonded with a glass supporting substrate. In the present invention, the fabrication method for the SU-8 mold and the PDMS casting and bonding processes are disclosed in detail so that the MEMS planar air amplifier ion focusing device can be fabricated by those skilled in the art. This fabrication method has advantages of simple process, low cost, small dimension size and easily implemented.

MEMS 2D air amplifier ion focusing device and manufacturing method thereof

Growing community of inventors

Dalian, China

Helin Zou