Aviza Technology Limited

Asml Us, Inc.

Helder R Carvalheira

Richard Savage

Bruce E Mayer

Dan Lester Cossentine

Philip A Troiani

Eric R Vaughan

Frank S Menagh

A semiconductor wafer processing system including a multi-chamber module having vertically-stacked semiconductor wafer process chambers and a loadlock chamber dedicated to each semiconductor wafer process chamber. Each process chamber includes a chuck for holding a wafer during wafer processing. The multi-chamber modules may be oriented in a linear array. The system further includes an apparatus having a dual-wafer single-axis transfer arm including a monolithic arm pivotally mounted within said loadlock chamber about a single pivot axis. The apparatus is adapted to carry two wafers, one unprocessed and one processed, simultaneously between the loadlock chamber and the process chamber. A method utilizing the disclosed system is also provided.

Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system

Growing community of inventors

Scotts Valley, CA, United States of America

Helder R Carvalheira