Applied Materials, Inc.

Helder Lee

Khai Ngo

Doug McAllister

Michelle A Wong

Substrate-handling robot end effector

A system includes a factory interface, a load port connected to the factory interface, and a system controller. The system controller is to, responsive to detecting that a container is received at the load port, determine a type of parts for storage at the container. One or more mapping patterns associated with the determined type of parts is identified. A detection system of robot arm(s) of the factory interface is moved according to the identified mapping pattern(s) to detect one or more parts stored by the container. A mapping of the container is determined based on the movement of the robot arm(s). The mapping indicates regions of the container that stores detected parts and a position of each of the detected parts. Based on the mapping, the robot arm(s) either remove a detected part form the container or place an additional part in the container.

Methods and systems for temperature control for a substrate

Systems and methods for grip-based transport speeds for objects transported at a manufacturing system is provided. A controller can detect an object placed on an end effector of a robot arm. The controller can apply vacuum pressure to secure the object to the end effector via vacuum grip pads. The controller can obtain a vacuum pressure measurement indicating the amount of vacuum pressure between the object and the end effector and determine whether the obtained vacuum pressure measurement satisfies a vacuum pressure criterion. The controller can determine a transport speed setting for transporting the object using the robot arm based on whether the obtained vacuum pressure measurement satisfies the vacuum pressure criterion. The controller can cause the robot arm to move the object according to the transport speed setting.

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San Jose, CA, United States of America

Helder Lee