University of Minnesota

Tsi, Inc.

Basf Se Corporation

Mann+hummel Gmbh

Heinz Fissan

David Y H Pui

Jing Wang

Frank D Dorman

Da-Ren Chen

Bernd Sachweh

Stanley L Kaufman

Frederick R Quant

David Y Pui

Markus Linsenbühler

Gilmore J Sem

Michael Mertler

Michael Schäfer

Manfred Tumbrink

Frank Jordan

Detlef Hummes

Christoph Kleinert

Christof Asbach

Yi Liu

Andreas Trampe

Weon Gyu Shin

Sheng-Chieh Chen

A system and method for characterizing a totality of particles selects a class of the totality of particles having a defined mobility; determines the total particle concentration of the class of particles; filters the class of particles using the filter apparatus and determines a filtered particle concentration indicative of the particles of the class which penetrate the filter apparatus; and determines at least one morphological parameter based on the fraction of particles of a class penetrating the filter apparatus.

Measurement of particle morphology using filtration

A method is proposed for characterizing a totality of particles. The method can be used in particular for characterizing microparticular or nanoparticular aerosols. The method comprises the following steps:

Measurement system for the multidimensional aerosol characterization

An instrument for non-invasively measuring nanoparticle exposure includes a corona discharge element generating ions to effect unipolar diffusion charging of an aerosol, followed by an ion trap for removing excess ions and a portion of the charged particles with electrical mobilities above a threshold. Downstream, an electrically conductive HEPA filter or other collecting element accumulates the charged particles and provides the resultant current to an electrometer amplifier. The instrument is tunable to alter the electrometer amplifier output toward closer correspondence with a selected function describing particle behavior, e.g. nanoparticle deposition in a selected region of the respiratory system. Tuning entails adjusting voltages applied to one or more of the ion trap, the corona discharge element and the collecting element. Alternatively, tuning involves adjusting the aerosol flow rate, either directly or in comparison to the flow rate of a gas conducting the ions toward merger with the aerosol.

Instruments for measuring nanoparticle exposure

An apparatus includes semiconductor processing equipment. A particle detecting integrated circuit is positioned in a vacuum environment, the particle detecting integrated circuit containing a device having a pair of conductive lines exposed to the vacuum environment. The pair of conductive lines is spaced at a critical pitch corresponding to diameters of particles of interest. A computer system is linked to the particle detecting integrated circuit to detect a change in an electrical property of the conductive lines when a particle becomes lodged between or on the lines.

Real-time monitoring of particles in semiconductor vacuum environment

An apparatus for separating aerosols or particles from a gas stream composed of a flow housing through which the gas containing the components to be separated flows, a separator, which is arranged in the flow housing, and a corona electrode, which is provided upstream of the separator in the direction of flow. The corona electrode is located substantially outside the gas flow. An air volume stream from the corona electrode flows into to the gas flow to transport charge carriers generated by the corona electrode into a charging zone in the flow housing.

Apparatus for separating aerosols or particles from gases

An apparatus for classifying polydisperse aerosols includes aerosol and sheath gas conduits for conducting a sample aerosol and a sheath gas toward a merger area. At the merger area the sheath gas and about ten percent of the sample aerosol merge, then travel through a differential mobility analyzer (DMA) and along a tubular electrode of the DMA. Selected particles, i.e. particles having electrical mobilities within a narrow range, pass through a collection aperture of the electrode. The DMA output, an aerosol consisting of the selected particles, is provided to a condensation particle counter or other device for determining the aerosol concentration. The remainder of the sample aerosol is conducted away from the merger area along a bypass flow conduit. The bypass flow and an improved aerodynamic design provide for a slit at the merger area that is sufficiently narrow to minimize unwanted electric field penetration at the slit and DMA entrance. An annular flow restriction feature in the bypass conduit promotes and maintains laminar, uniform-velocity flow near the slit. The collection aperture is located medially along the tubular electrode, to prevent electrical field fringing near the aperture.

Instrument for measuring and classifying nanometer aerosols

Growing community of inventors

Kerken, Germany

Heinz Fissan