Leybold Vakuum Gmbh

Oerlikon Leybold Vacuum Gmbh

Heinz-Dieter Odendahl

Christian Beyer

Roland Blumenthal

Dieter Bohry

Robert Stolle

A turbomolecular pump () comprises a stator (), a pump rotor () a motor () for driving the pump rotor and a control device (). The control device () controls the motor output power such that the motor output power does not exceed a permissible maximum motor output power. On the stator side of the turbomolecular pump (), temperature sensors () for measuring the stator temperature are arranged. The control device () comprises a maximum output power detecting device () that determines the permissible maximum motor output power in dependence on the measured stator temperature. Thus, the permissible maximum motor output power is not set to a constant value but always fixed in dependence on the current, measured stator temperature. Thereby, the capacity of the motor can be fully utilized as long as the measured stator temperature lies below a maximum value.

Turbomolecular pump

The present invention relates to a friction vacuum pump having at least one turbomolecular pump stage (,) joined at its pressure side to a screw pump stage (,). In order to improve the pump properties it is proposed that a filling stage (,) be arranged between the turbomolecular pump stage (,) and the screw pump stage (,) that has blades (,) whose length corresponds at the suction side to the active length of the blades at the pressure side of the turbomolecular pump stage (,), and at the pressure side to the depth of the suction-side region of the screw (,) of the screw stage (,).

Growing community of inventors

Kö'ln, Germany

Heinz-Dieter Odendahl