Alcatel Hochvakuumtechnik Gmbh

Alcatel Cit

Heinz-Dieter Burger

Claude Saulgeot

Klaus Handke

Vacuum pump unit

The invention relates to a mechanical vacuum pump having a displacement member (2) and a casing (1) which is provided with an inlet channel (3) on the suction side and an outlet channel (4) on the discharge side. A spring-loaded non-return flap valve (5) is incorporated into the outlet channel (4). Upstream of this flap (5), a gas jet pump (7, 8) is installed in the outlet channel (4), the jet direction being parallel to the sealing surface of the non-return flap valve (5).

Mechanical primary vacuum pump including a spring-loaded non-return flap

A molecular high-vacuum pump has a bell-shaped rotor 5 including a shaft supported by roller bearings 12, 13 disposed inside the bell rotor. The stator 1, 6 defines two converging pumping stages, one in cooperation with the inner cylindrical surface 10 of the rotor and the other in cooperation with the outer cylindrical surface 9 of the rotor. The suction inlet 3 is disposed in the apex area 4 of the bell rotor. The discharge outlet 11 of the pump is disposed in the vicinity of the lower rim of the bell, and both pumping stages transfer gases towards this rim. In this way, gases introduced through the inlet 3 into the pump cannot penetrate into the motor space 15 and damage the bearings of the pump.

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Wertheim, Germany

Heinz-Dieter Burger