Gkss-forschungszentrum Geesthacht Gmbh

Gesellschaft Fur Kernenergieverwertung in Schiffbau Und Schiffahrt Mbh

Ckss Forschungszentrum Geesthacht Gmbh

Heinrich Schwenke

Harald Schneider

Joachim Knoth

Herbert Rosomm

Rainer Marten

Ulrich Weisbrod

A method and arrangement for analyzing specimens pursuant to the X-ray fluorescence analysis method utilizing a beam detector to detect a secondary beam that originates from the specimen that is to be analyzed and upon which is directed a primary X-ray beam, the path of which is adjustable in at least one axis of freedom. The surface of a specimen holder on which the specimen is placed is disposed parallel to, and at a defined distance from, a reference plane at which the primary beam is reflected under total reflection conditions. Subsequently, the path of the primary beam is adjusted relative to the reference plane while simultaneously detecting, with a detector, the radiation spectrum of the secondary beam of the specimen. At a predetermined energy level of the primary beam, a secondary beam intensity maximum, to which is assigned a specific reference angle, is determined.

Method and arrangement for analyzing specimens pursuant to the x-ray

The present invention relates to an arrangement for the non-destructive measurement of metal traces in the surface of material samples in which the surface is irradiated with X-ray radiation and a detector, fastened above the material sample, spectrometrically examines the fluorescent radiation emanating from the material sample. Metal impurities are detected in the surface of, for example, silicon wafers down to about 10.sup.11 atoms/cm.sup.2, on-line, with the wafers being free from contamination by the measuring process. It is possible to sweep the entire surface area of wafers having a diameter up to about 150 mm at the locations fixed by the respective standards. The X-ray radiation directed onto the surface of the material sample by means of an adjustable X-ray source, the divergence of the exciting X-ray radiation being limited by two aperture members, the aperture members being disposed in a quartz body serving as an optical bench. A positioning device is provided with which the material sample can be pressed against a surface of the quartz body.

Arrangement for the non-destructive measurement of metal traces

A measuring device for X-ray fluorescence analysis, in which a specimen dosed on a carrier is stimulated by glancing incident radiation and examined spectrometrically by a detector which may be arranged above the specimen. On the upper side of an e.g., box-shaped housing in which a vacuum can be created, there is provided a detector extending into the interior of the housing. This detector is connected to the housing by means of a pivotable frame within the housing. The pivot axis of the frame is located in the measuring plane of the detector. Provided on the pivotable frame is a remote controllable specimen exchanger and a remote controllable disengaging device for shifting the specimen carrier out of its operative position, the disengaging device being substantially aligned with the detector axis. The pivotable frame has furthermore provided thereon counter bearings for the specimen carriers; these counter bearings surround the measuring region. In one side wall of the housing there is provided a ray inlet window which is aligned with the measuring plane. This window is for a radiation source which can be placed externally in front of the housing.

Measuring devices for X-ray fluorescence analysis

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Escheburg, Germany

Heinrich Schwenke