Balzers Aktiengesellschaft

Heinrich Fischer

Roman Schertler

Gregor Strasser

Gerald Zohrer

A method for a reactive surface treatment of a workpiece, according to which a treatment gas is let out of at least one infeed opening into a treatment chamber and is drawn off said treatment chamber through at least one draw off opening, which openings are arranged adjacent of each other over and across the area to the surface to be treated and feature axes of the openings which extend at least approximately perpendicularly to the surface to be treated. The treatment chamber further includes a support for positioning of the workpiece in such a manner that at least one infeed opening which is connected to a gas delivery device for a treatment gas and at least one draw off opening which is connected to a gas draw off device are located opposite the surface of the positioned workpiece.

Method for a reactive surface treatment of a workpiece and a treatment

A lock chamber for conveying a workpiece from one medium (U.sub.0) into another medium (U.sub.7) which comprises a lever (11) acting as a transport system and pivotably mounted in the chamber on one side. With lock gates (5a, 5b) moves aside the lever (11) can swing out by a required degree into the respective media (U.sub.7, U.sub.0). With the design of the transport system as unilaterally mounted levers (11), the volume of the lock chamber is largely independent of the trajectory of the lever and the volume can be minimized (FIG. 1).

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Triesen, Liechtenstein

Heinrich Fischer