Leybold Vakuum Gmbh

Leybold Aktiengesellschaft

Leybold Gmbh

Leybold-heraeus Gmbh

Oerlikon Leybold Vacuum Gmbh

Heinrich Engländer

Christian Beyer

Josef Hodapp

Michael Froitzheim

Gunter Schutz

Hans-Peter Kabelitz

Wilhelm Walter

Friedrich Karl Von Schulz-Hausmann

Thomas Dreifert

Ralf Steffens

Winfried Kaiser

Hartmut Kriehn

Frank Fleischmann

Klaus Rofall

Manfred Behling

Lothar Brenner

Hans-Rudolf Fischer

Peter Klingner

Ingo Seckel

Friedrich Schmaus

Robert Schneiders

Dietrich Urban

Hinrich Henning

Friedrich Schulz-Hausmann

Christian Harig

Ludger Deters

Hans Rudolf Fischer

Karl-Heinz Völker

Wolfgang Schulz

A connection device serves for connecting a first tube end, which can be connected to a vacuum pump, to a second tube end which can be connected to a chamber to be evacuated. To this end, the connection element has a tube element for fluidically connecting the vacuum pump to the chamber to be evacuated. The tube element is connected on each side via a connection element to the respective tube end. At least one of the two connection elements is configured here in such a way that it is exclusively suitable for transmitting torques. Furthermore, a decoupling element is provided for mechanically decoupling the at least one connection element, which is exclusively suitable for transmitting torques, from the corresponding tube end.

Connection device

A device for storing kinetic energy, which has a flywheel in a housing. The flywheel is mounted in the housing via a shaft. A motor-generator unit is provided for storing energy as well as for energy recovery. In order to improve efficiency, a vacuum pump for evacuating the interior is arranged in the housing. The vacuum pump is disposed on the shaft.

Device for storing kinetic energy

A rotor disc for a vacuum pump, in particular a turbo molecular pump, having an inner ring. The inner ring is connected to a plurality of blade elements extending radially outward. The inner ring has at least one expansion joint. For assembly, the inner ring can be surrounded by a retaining ring and arranged on a hollow cylindrical carrier element as applicable.

Rotor disc and rotor for a vacuum pump

A multi-stage pump rotor () for a turbomolecular pump has at least two separate blade disk rings (), each having a motor ring () and at least one blade disk (). A cylindrical reinforcement pipe (), which surrounds the rotor rings () of the blade disk rings () on the outside without clearance, is provided between the blade disks () of adjacent blade disk rings (). The reinforcement pipe () absorbs a large part of the tangential forces occurring during operation such that the pump rotor () has improved stability at high rotor speeds.

Multi-stage pump rotor for a turbomolecular pump

A mechanical vacuum pump includes a rotor made of a light metal alloy by powder metallurgy. The powder metallurgy increases the resistance of the rotor to heat and creep.

Mechanical kinetic vacuum pump

A side channel pump, preferably a vacuum pump, includes a driven rotor () and a fixed stator (). The rotor () and the stator () define a pump channel circulating in a peripheral direction. Blades are fixed onto the rotor, protruding into the cross-section of the pump channel. The pump channel also includes a blade-free side channel (). The pump channel () containing the side channel () extends in a helical manner around the rotor (). The pump channel is advantageously not limited to the length of a winding but can have the length of substantially any number of uninterrupted windings. As a result, a high suction performance and a high compression ratio in the pump can be obtained.

Pump embodied as a side channel pump

A friction vacuum pump () comprises a fixed element () bearing rows of stator blades () and a rotating element () bearing rows of rotor blades (). The rows of stator blades and rotor blades are arranged concentrically with respect to an axis of rotation () of the rotating element () and mesh with each other. In order to create in the axial direct a short friction pump, the elements () bearing the rows of rotor blades and stator blades extend in a substantially radial manner and the longitudinal axes of the blades () extend in a substantially axial manner.

Friction vacuum pump

The invention relates to a magnetic bearing having a fixed first bearing portion and a movable second bearing portion which is contactlessly supported on the first bearing portion. The first bearing portion () comprises a magnetic coil () generating a magnetic field and having a yoke (). The second bearing portion () comprising a permanent magnet () which is magnetized in alignment with the yoke (). The permanent magnet of the second bearing portion has an attracting effect upon the yoke of the first bearing portion. To avoid this, the first bearing portion is provided with a permanently magnetized compensation magnet () which is located opposite the permanent magnet () of the second bearing portion () and is magnetized oppositely to the permanent magnet ().

Magnetic bearing

A mechanical kinetic vacuum pump with a stator (), a rotor () made from an aluminum or magnesium alloy and a rotor () and a bearing shaft (). The shaft () and the rotor () are connected by a shrink- or screw-fit in a secure permanent connection. The rotor () is made by spray forming. The main alloying component in the aluminum or magnesium alloy is silicon which is present in an amount such that the alloy has an expansion coefficient which essentially corresponds to the expansion coefficient of the shaft material.

Mechanical kinetic vacuum pump with rotor and shaft

A rotor () is mounted in a stator () with radial magnetic bearings () and with an axial magnetic bearing () in a contactless manner. The axial magnetic bearing () produces an axial magnetic field with a magnet coil () and a yoke iron () mounted on the stator (). An axially magnetized permanent magnet () is provided on the rotor (), located approxaimately axially opposite the yoke iron (). A permanently axially magnetized compensating magnet () is provided on the stator () and arranged axially opposite the permanent magnet of the rotor () and polarized in the opposite direction, such that the permanent magnet () of the rotor and the compensating magnet () repel each other. In a center position, the rotor is bias-free by compensating the forces of attraction between the permanent magnet of the rotor and the yoke iron. As a result, the center position of the rotor can be adjusted with relatively small magnet coil flows. This results in small magnet coils, produces less heat and reduces the required power of the axial bearing.

Vacuum pump

A vacuum line () comprising a vacuum-tight flexible tube section () and a vibration damper () axially parallel to the flexible tube section () serves to connect tow vacuum devices (). The vibration damper () is an actively regulated axial magnetic bearing. Thereby, a vibration damper with good dampening properties is realized. By changing the regulation parameters, the vibration damper is adaptable and not subjected to any mechanical wear. The transmission of structure-borne noise is avoided by the contactless vibration dampening.

Vacuum conduit

A vacuum pump has two shafts () and two rotors () which co-operate with each other and which are fixed to the shafts. The rotors are cantilevered on the shafts. The rotors are fixed to the shafts in a manner which is devoid of backlash, even during temperature changes. In order to achieve this, the shafts () are made of a material having a modulus of elasticity which is as high as possible, e.g., steel. The rotors () are made of a material having a density which is as low as possible, e.g., aluminum or a titanium alloy. Structures (; etc.) are provided to ensure that the rotors () are fixed to the shafts () in a manner which is devoid of backlash at all operating temperatures.

Two-shaft vacuum pump

A vacuum pump has a shaft bearing (6) supported in a bearing outer ring (8). In order to improve the damping properties a substantially cylindrical radial supporting ring (7) is provided between the outer ring (8) and an interior surface of a bore (9) in a housing (1). First and second circumferential projections (11, 12) project from opposite edges of cylindrical ring (7) on one side. On its other side, a third circumferential projection (13) is axially arranged between the first projections (11, 12). The first and second projections engage one of the outer race and the bore and the third projection engages the other. The damping of the radial support ring (7) is determined by its radial stiffness which is determined by the stiffness of the material and the distance between the projections (11, 12, 13).

Growing community of inventors

Linnich, Germany

Heinrich Engländer