Vaisala Oy

Heikki Mesia

Ari Lehto

Lars Stormbom

Jouko S Jalava

Pekka Belt

This invention concerns a method for trimming a planar capacitor. According to the method, a laser emission is focused to an electrode of a capacitor formed on a substrate transparent to laser emission and including of an upper electrode, an insulation layer, and a lower electrode, in order to achieve a passivation effect on the electrode. The laser emission is focused according to the invention locally onto the lower electrode through the substrate in order to achieve a heating effect on the lower electrode, thereby oxidizing the electrode material so that the lower electrode is locally converted into an electrically nonconductive state while being protected by the substrate and the insulation layer. The trimming method in accordance with the invention is accurate and offers a stable capacitance value.

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Helsinki, Finland

Heikki Mesia