Samsung Electronics Co., Ltd.

Dnf Co., Ltd.

Hee Yeon Jeong

Joong Jin Park

Sang Ick Lee

Chi Hyun Cho

Myong Woon Kim

Dong Il Son

Gyu-Hee Park

Chang Ryong Heo

Se Jin Jang

Sung Gi Kim

Byeong-il Yang

Jeong Joo Park

Sam Dong Lee

Jung Su Ha

Youn Joung Cho

Mi Jeong Song

Jae Seok Joo

Byeong Il Yang

Jun Hee Cho

Gun-Joo Park

Eun Hyea Ko

Ji Yu Choi

An atomic layer etching method capable of precisely etching a metal thin film at units of atomic layer from a substrate including the metal thin film, includes forming a metal layer on a substrate, and etching at least a portion of the metal layer. The etching at least a portion of the metal layer includes at least one etching cycle. The at least one etching cycle includes supplying an active gas onto the metal layer, and supplying an etching support gas after supplying the active gas. The etching support gas is expressed by the following general formula wherein each of R1, R2, R3, R4 and R5 independently includes hydrogen or a C-Calkyl group, and N is nitrogen.

Atomic layer etching method and semiconductor device manufacturing method using the same

Provided are a composition for depositing a silicon-containing thin film, containing a trisilylamine compound and a method for producing a silicon-containing thin film using the same, and more particularly, a composition for depositing a silicon-containing thin film, containing a trisilylamine compound which is capable of forming a silicon-containing thin film at a very high deposition rate at a low temperature to be usable as a precursor of a silicon-containing thin film and an encapsulant of a display, and a method for producing a silicon-containing thin film by using the same.

Composition for depositing silicon-containing thin film and method for producing silicon-containing thin film using the same

Disclosed is a method of outputting an alarm, the method being performed by an electronic device, the method including receiving a request for setting a schedule, from at least one user, storing identification information and schedule execution information on the at least one user, and tracking a target user of the schedule. If an alarm execution time included in the schedule execution information comes, the method further includes providing an alarm related to the schedule to the target user in a specific manner.

Method of outputting alarm and electronic device supporting the same

Growing community of inventors

Jecheon-si, South Korea

Hee Yeon Jeong