Samsung Electronics Co., Ltd.

Hee-Won Sunwoo

Soo-Bok Chin

Hyung-Seop Kim

Byoung-Ho Lee

Dong-Chul Ihm

Jong-Cheon Sun

A method for detecting defects includes irradiating at least one electron beam into a first region of a substrate, irradiating at least one electron beam into a second region electrically connected to the first region, and detecting secondary electrons emitted from the second region. The electron beam irradiated into the first region may be the same or different from the electron beam irradiated into the second region. Alternatively, different beams may be simultaneously irradiated into the first and second regions. An image generated based on the secondary electrons shows a defect in the substrate as a region having a grayscale difference with other regions in the image.

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Seoul, South Korea

Hee-Won Sunwoo