Electronics and Telecommunications Research Institute

Hee-keyng Sung

Young-Tak Han

Sang-Ho Park

Duk-Jun Kim

Jang-Uk Shin

Yoon-jung Park

There is provided an optical module incorporating active elements such as light emitting devices or photo detective devices mounted on a single substrate. The optical module can suppress optical and electrical crosstalk by a blocking trench formed between the active elements for blocking optical and electromagnetic waves, and a metal barrier formed within the blocking trench for blocking the optical and electromagnetic waves. Further, the optical module can suppress the optical and the electrical crosstalk due to the optical and the electromagnetic waves directed upward the substrate by a housing body enclosing the substrate, a housing cover provided on the housing body, and a metal slit formed below the housing cover and above the metal barrier.

Optical module for suppressing optical and electrical crosstalk simultaneously

An optical waveguide platform and a manufacturing method thereof are provided. In the provided optical waveguide platform, a terrace on which an optical device is mounted is formed by using an etch stopper pattern formed on a lower clad layer. Therefore, the optical device is mounted without processing a silicon substrate. In addition, in the provided optical waveguide platform, the etch stopper pattern is formed on the lower clad layer to prevent defocus in a photolithography process due to an etch step, so as not to damage a fine waveguide pattern. Moreover, an optical waveguide is formed on the terrace in manufacturing the optical waveguide platform to examine the characteristics of the optical waveguide device before etching a trench.

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Daejeon, South Korea

Hee-keyng Sung