Entegris, Inc.

Hee Jun Yang

Kobold Yang

Han Yi Wang

Bob Shie

A filter that is self-locking to a filter manifold includes a flange having a major axis and a minor axis in plan view, and that is longer along the major axis than the minor axis. The filter further includes a stopper on the major axis, that can contact a filter manifold when the filter is inserted into the manifold and rotated. The filter can be used with a filter manifold having a slot with an opening having a width greater than the length of the minor axis and smaller than the length along the major axis of the flange, and past the opening, has sufficient width to accommodate the length of the major axis. This arrangement allows the flange to be inserted into the slot in an insertion orientation, but does not permit the flange to pass through the opening of the slot when it is in a locking position.

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Songpa-gu, South Korea

Hee Jun Yang