Fugen Co., Ltd.

Hee Jun Ahn

Joo Taek Kim

The present invention relates generally to a pendulum valve that is installed in a connection pipe connecting a vacuum pump between the chamber of a dry etching apparatus and the vacuum pump in the etching line of a semiconductor manufacturing process and adjusts the amount of gas, and more particularly to a pendulum valve that includes a fixed housing configured such that a shaft coupled to a valve gate for adjusting the amount of gas is closely fixed to a valve housing through an O-ring and a rotation shaft (an internal shaft) coupled to the inside of the fixed housing, so that only the rotation shaft separate from the value housing is rotated by using a lip seal as a rotation axis, thereby suppressing the discharge of unnecessary particles and hardened substances while maintaining the sealing characteristics of the pendulum valve.

Growing community of inventors

Pyeongtaek-si, South Korea

Hee Jun Ahn