Samsung Electronics Co., Ltd.

Hee Jong Jeong

Hyungjoon Kim

Myoungwoon Kim

Jungwoo Choi

Sang Shin Lee

Jiwoon Im

Chaeho Kim

Seung-Min Ryu

Il-Woo Kim

Jaebong Lee

Juwan Lim

Jaewon Jung

Je-Dong Lee

Ji Su Son

Younghoon Kwon

An electronic circuit includes a first filter and a second filter. The first filter passes a first frequency component of a first harmonic frequency generated by a first voltage source to form a potential difference in a chamber and a second frequency component of a second harmonic frequency higher than the first harmonic frequency. The second filter removes the first frequency component and the second frequency component received from the first filter. The second harmonic frequency is included in a first frequency band determined based on a capacitance of the second filter.

Electronic circuit for filtering signal received from plasma chamber

A radio frequency (RF) power monitoring device includes an RF sensor to monitor RF power transferred to a target load and an impedance of the target load and a transmission line to electrically connect the RF sensor to the target load and to transfer the RF power to the target load. A phase (&#x3c6;z) of the impedance of the target load is adjusted to satisfy a range of &#x2212;30&#xb0;+180&#xb0;*n&#x3c;&#x3c6;z&#x3c;30&#xb0;+180&#xb0;*n (where n=&#x2212;2, &#x2212;1, 0, 1, or 2).

Radio frequency (RF) power monitoring device and plasma enhanced (PE) system including the same

An apparatus is provided for depositing a thin film. The apparatus includes a chamber, a susceptor disposed in the chamber and supporting a substrate, a reflection housing disposed outside the chamber, a light source unit disposed in the reflection housing and irradiating light to the susceptor, and a light controlling unit blocking at least a portion of an irradiation path of the light to control an irradiation area of the light on the susceptor. At least a portion of the light controlling unit is disposed in the reflection housing.

Apparatus for depositing a thin film

Growing community of inventors

Hwaseong-si, South Korea

Hee Jong Jeong