Semes Co., Ltd.

Hee Jae Byun

Sang Oh Kim

Myung Jin Lee

Na Hyun Lee

Sang-Oh Kim

Wan Hee Jeong

Ki Won Han

Kyo Bong Kim

Doo Hyun Baek

Hee Chan Kim

Chan Young Choi

Embodiments of the inventive concept provide a wireless power apparatus for a substrate treating apparatus and a manufacturing method for the wireless power apparatus for the substrate treating apparatus for preventing a heat generation by preventing a generation of an eddy current in a coupling element, if the coupling element is used around an outer housing at which an induced magnetic field is formed. The inventive concept provides a wireless power apparatus for a substrate treating apparatus. The wireless power apparatus includes an outer housing having a main power line forming an induced magnetic field by receiving a power, and a coupling part coupling at least two components among components which are positioned at a periphery of the main power line for fixing the main power line; and an inner housing positioned spaced apart from the outer housing, generating an electromotive force through the induced magnetic field generated from the outer housing, and supplying the electromotive force which is generated to the substrate treating apparatus, and wherein the coupling part is formed of a material at which an eddy current is not generated by the induced magnetic field.

Wireless power apparatus for substrates treating apparatus and manufacturing method of wireless power apparatus for substrate treating apparatus

A tower lift includes a main frame, a first carriage module and a second carriage module connected with each other inside the main frame at left and right sides of the main frame, respectively, having the same weight as each other, and configured to be moved in a vertical direction, and a driving module installed on the main frame and configured to move the first carriage module and the second carriage module in the vertical direction.

Tower lift

A substrate transferring apparatus including a non-contact type driving unit is provided. The substrate transferring apparatus comprises a stator assembly including a driving surface and an electromagnetic generating module, a first mover including a first magnet module facing the electromagnetic generating module and floating and moving on the driving surface, and including a first inclined surface, a second mover including a second magnet module facing the electromagnetic generating module and floating and moving on the driving surface, and including a second inclined surface, and a transfer member disposed between the first mover and the second mover and moving along the first inclined surface and the second inclined surface according to a distance between the first mover and the second mover.

Apparatus and method for transferring the substrate

Growing community of inventors

Yongin-si, South Korea

Hee Jae Byun