Samsung Electronics Co., Ltd.

Hee-duk Kim

Jin-sung Kim

Sung-bum Cho

Jae-Hyun Lee

Ju-hyuck Chung

Sun-hoo Park

Jang-eun Lee

Shin-woo Nam

Jong-wook Choi

Young-koo Lee

Jeong-hyuck Park

Jung-hun Cho

Kyue-Sang Choi

Chang-woo Woo

Byoung-Hyo Jung

A process chamber used in the manufacture of a semiconductor device for etching a material layer on a semiconductor wafer includes an electrostatic chuck for holding the semiconductor wafer, and an annular edge ring which surrounds the side of the semiconductor wafer on the electrostatic chuck to prevent the semiconductor wafer from departing from its original position. The annular edge ring has a first side which faces the side of the semiconductor wafer and contacts firmly with the side of the semiconductor wafer.

Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates

An optical microscope has an illuminator from which light emanates to illuminate an object under examination, and an auxiliary magnifying lens unit which magnifies an image of the object formed by the light reflecting from the object. A reflective cover is connected to the bottom of the ocular lens unit of the microscope. An auxiliary magnifying unit, made up of the auxiliary magnifying lens mounted in a casing, is disposed within the reflective cover adjacent the bottom of the ocular lens unit. The illuminator is located between the reflective cover and the casing of the auxiliary magnifying unit. The auxiliary magnifying lens is thus shielded from the illuminator. The light emitted from the illuminator is prevented from propagating directly to the auxiliary magnifying lens (along any straight line from the illuminator) or indirectly to the auxiliary magnifying lens via reflection from the inner wall of the reflective cover. Accordingly, a clear image of the object is produced. Furthermore, the reflective cover screws the auxiliary magnifying unit onto the bottom of the ocular lens unit. These components can be easily and quickly assembled and disassembled as the need arises.

Illumination system for use with an optical instrument having an

An apparatus and a method for eliminating moisture or fumes contained in the exhaust gas more efficiently. The apparatus has a diffusion cup disposed in a diffusion chamber contained in a housing of the apparatus. The housing has a gas inflow sleeve, a gas exhaust tube and a drain pipe connected to the bottom of the housing. In the apparatus, the exhaust gas introduced through the gas inflow sleeve into the housing collides with the diffusion cup and is diffused throughout the diffusion chamber, decreasing the temperature of the gas. Thereafter, nitrogen gas is sprayed at high pressure forcing the exhaust gas out of the diffusion chamber. Impurities, including moisture, fumes, and the like contained in the exhaust gas are quickly eliminated, thereby preventing corrosion of the duct work in the system. Therefore, costs for maintaining the apparatus can be subsequently reduced and environmental pollution can be efficiently prevented.

Apparatus and method for processing exhaust gas

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Kyungki-do, South Korea

Hee-duk Kim