Motorola Corporation

Hector T Chen

Douglas J Resnick

William A Johnson

Kevin D Cummings

A uniform heating fixture and method of use is provided. A heat conductive member having a first plane surface, a second surface and a third plane surface is formed. The first plane surface and the third plane surface are parallel and are connected by a second surface. The third plane surface circumscribes and extends away from the first plane surface, thereby enabling uniform heating of an X-ray mask.

Planar uniform heating surface with additional circumscribing ring

An x-ray lithography method for irradiating an object (14) to form a pattern thereon uses an x-ray mask (10) having a membrane (18). The membrane (18) has an open membrane surface (26), and x-ray radiation (16) is passed through the open membrane surface (26) to irradiate the object (14). During this irradiation, the open membrane surface (26) is substantially uniformly exposed to the x-ray radiation (16) so that stress-induced distortion of the membrane (18) is reduced.

Growing community of inventors

Madison, WI, United States of America

Hector T Chen