Kemira Oy

Hayha

Vesa-Pekka Judin

Pertti Koukkari

The invention relates to a process for the production of silicon ceramic whiskers and silicon ceramic powder from silicon fluoride and ammonia or a hydrocarbon, at an elevated temperature. According to the invention, the hydrocarbon or ammonia (4) is decomposed separately at a high temperature into reactive carbon or nitrogen and hydrogen, whereafter the carbon or nitrogen radical thus obtained is further in a gas phase contacted with reactive silicon formed therein from silicon difluoride, in order to deposit finely-divided silicon nitride or silicon carbide out from the gas phase.

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Helsinki, Finland

Hayha