Tokyo Electron Limited

Hayato Aoyama

Michishige Saito

Ryoichi Yoshida

Akira Obi

Tetsuo Yoshida

Toshikatsu Wakaki

Hiroshi Suzuki

A plasma etching method by using a plasma etching apparatus having a depressurizable processing chamber; a lower electrode for mounting thereon a substrate to be processed in the processing chamber; an upper electrode facing the lower electrode in the processing chamber with a plasma generation region formed therebetween; a radio frequency power supply unit for applying a radio frequency power between the upper electrode and the lower electrode to thereby form a radio frequency electric field in the plasma generation region, the method comprising: supplying a first gas including etchant gas to an upper gas inlet to introduce the first gas through the upper electrode into the plasma generation region; and feeding a second gas including dilution gas to a side gas inlet to introduce the second gas through a sidewall of the processing chamber into the plasma generation region.

Growing community of inventors

Nirasaki, Japan

Hayato Aoyama