Samsung Electronics Co., Ltd.

Hashimoto Kohei

Kwang-Soo Kim

Byeong-hwan Jeon

Won-Don Joo

Wook-rae Kim

Young-kyu Park

Sue-Jin Cho

Byeong-Hwan Jeon

Wook-Rae Kim

Provided are a light source device and a semiconductor manufacturing apparatus including the same. The light source device includes a light-emitting lamp. The light source device includes a laser generator configured to generate and direct a laser beam to the light-emitting lamp. The light source device includes a recycling optical element configured to redirect the laser beam to the light-emitting lamp. The recycling optical element includes a first recycling optical modulator configured to change the phase of the laser beam.

Light source device and semiconductor manufacturing apparatus including the same

A plasma light source apparatus is provided. The plasma light source apparatus includes a chamber, a laser generating part, and a curved mirror. The chamber includes a plasma source gas for generating laser induced plasma. The laser generating part is spaced apart from the chamber and generates a hollow laser beam. The curved mirror is disposed between the chamber and the laser generating part. The curved mirror is configured to reflect and to condense the generated hollow laser beam into the chamber to generate the laser induced plasma in the chamber, and to reflect light emitted from the generated laser induced plasma.

Plasma light source apparatus and plasma light generating method

Growing community of inventors

Gyeonggi-do, South Korea

Hashimoto Kohei