Grumman Aerospace Corporation

Quantronix Corporation

Harvey Stone

Benjamin J Pernick

Richard E Kopp

Martin R Wohlers

Jay Mendelsohn

Joseph Lisa

Richard T Daly

Robert A Kaplan

John Vogler

Zbigniew Drozdowicz

Walter Rhoades

A method and device are provided to accomplish laser driven pyrolytic, photolytic and photoactivativation process requiring controlled atmosphere without the use of gas tight cells. A method and device are provided to correct clear faults on a photo-lithographic mask by metallic deposition on the mask at standard temperature and pressure. The deposition is formed by the pyrolytic decomposition of an organometallic gas mixture which may include chromium and molybdenum hexacarbonyls, and a buffer gas. The decomposition is done utilizing a laser beam. The device may be incorporated into a system which has other members used to correct opaque faults in the same mask.

Photolithographic mask repair system

A reliable, low cost, light weight, CW pumped Nd:YAG laser with optional Q-switching is provided with a rail for the laser optics that isolates the optical axis from movement of the laser head housing. A laser pot is provided with a housing and quickly detachable cover both molded of a resin that is impervious to water, optically opaque, possesses low thermal deformation, high dielectric strength and resistance to damage by light and UV radiation. The pot is formed with a cavity lined by molded reflectors and divided by a septum interposed between the laser rod and lamp. The lamp is removable with the cover and is readily coupled with the lamp sockets designed for accepting variations in lamp manufacturing tolerances. The power supply for the laser resonator is transformerless and parallel triggering is employed for the lamp. The cooling system is provided with a water immersed heat exchanger defined by a coated copper tube that prevents ionic action.

YAG Laser system

A means of probing a biological cell sample with a optical source to determine the characteristics of the cell image by way of measuring parameters from its two dimensional Fourier transform. These techniques lead to a method of measuring discriminating parameters for cell classification.

Method for classifying biological cells

Method and apparatus for classifying biological cells

Growing community of inventors

Flushing, NY, United States of America

Harvey Stone