Nec Corporation

Haruto Hamano

Hidemitsu Aoki

Yoshimi Shiramizu

Hirofumi Seo

Masaharu Nakamori

Yasushi Sasaki

Yuji Shimizu

Hiroshi Kitajima

Makoto Morita

Kaori Watanabe

Nahomi Ohta

Makoto Iuchi

The method for producing electrolyzed water includes the step of applying a voltage to electrodes disposed in an electrolytic cell containing therein pure water including electrolyte therein. A strength of an electric field generated by applying a voltage to the electrodes is controlled to be variable by means of various techniques. The method makes it possible to produce electrolyzed water with a smaller amount of energy than prior methods.

Method for producing electrolyzed water

In a wet processing apparatus, an electrolytic cell, a first storing cell for storing anode active water of the electrolytic cell, a first processing cell for processing a target with the anode active water of the first storing cell, a second storing cell for storing cathode active water of the electrolytic cell, and a second processing cell for processing a target with the cathode active water of the second storing cell are provided. Also, a first reactivating feedback path is provided between the first processing cell and an anode region of the electrolytic cell, and a second reactivating feedback path is provided between the second processing cell and a cathode region of the electrolytic cell.

Wet processing apparatus having individual reactivating feedback paths

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Tokyo, Japan

Haruto Hamano