Disco Corporation

Harunobu Yuzawa

Makoto Tanaka

Shinya Yasuda

Satoshi Hanajima

Shuji Nitta

Yoshio Matsushita

A control unit of a cutting apparatus has a suction checking function of determining that foreign matter is clogged in a suction hole and issuing an instruction on removal of the foreign matter in a case where the value of a pressure gauge before mounting of a cutting blade onto a mount is less than a first predetermined value, and a mounting checking function of inhibiting start of rotation of a rotary shaft in a case where the value of the pressure gauge after mounting of the cutting blade onto the mount does not reach a second predetermined value smaller than the first predetermined value and permitting the start of rotation of the rotary shaft in a case where the value of the pressure gauge after mounting of the cutting blade onto the mount has reached the second predetermined value.

Cutting apparatus

A cutting apparatus includes a cutting unit configured to cut a workpiece held on a chuck table, and a groove detecting unit including a CCD imaging element photographing the workpiece held on the chuck table. The groove detecting unit photographs, by the CCD imaging element, a laser-processed groove and a cut groove illuminated by an oblique illumination set such that a light amount of light in a direction parallel with an extending direction of the laser-processed groove as viewed in plan is higher than a light amount of light in a direction orthogonal to the extending direction of the laser-processed groove.

Growing community of inventors

Tokyo, Japan

Harunobu Yuzawa