Hitachi, Ltd.

Hitachi Global Storage Technologies Japan, Ltd.

Harunobu Saito

Tadayuki Iwakura

Tomohiro Okada

Naoki Koyama

Makoto Morijiri

Tetsuya Okai

Shinobu Sasaki

Takashi Kawabe

Tetsuo Kobayashi

Eisei Togawa

Saburo Suzuki

Shunichiro Kuwatsuka

Tadashi Imanaka

Hiroshi Fukui

Moriaki Fuyama

Kazuo Shiiki

Isamu Yuito

Kanji Kawakami

Masaki Ohura

Hiromi Shiina

Eijin Moriwaki

Kazuo Nate

Shuichi Kojima

Gen Oikawa

Sadanori Nagaike

Yoshihiro Hamakawa

Masayasu Fujisawa

Issei Takemoto

Noriyuki Saiki

Eiji Ashida

Yoshiki Hagiwara

Akiko Mizushima

Masayuki Takagi

Hiroshi Ishizaki

Hideki Sonobe

Yoshikazu Tsuji

Masayasu Kagawa

Osamu Hirai

Akira Kondo

Kenji Ishikake

Kasufumi Azuma

Keiko Shiokawa

Disclosed is a magnetic disk apparatus including a magnetic reproducing head portion, and a magnetic recording head including an upper magnetic core having a end portion and a rear portion. As a resist for a frame which is used for forming the rear portion, a negative resist or an electron beam resist is used, whereby the frame is formed without any adverse effect of halation from a coil insulating film. That is, it is possible to manufacture a magnetic recording head in which the rear portion of an upper magnetic core is not emerged at the face opposed to a medium, and hence to obtain a magnetic disk apparatus exhibiting an areal recording density of 5 Gbit/inor more by mounting a magnetic recording/reproducing head including such a magnetic recording head.

Thin film magnetic head and magnetic disk apparatus including the same

In formation of an upper shield of a magnetic thin film head by electroplating, a current density of electroplating is regulated stepwise with time. Thus, in the upper shield formation, a film composition and magnetic characteristic with respect to the direction of film thickness can be controlled precisely, making it possible to provide a magnetic thin film head featuring significantly reduced noise-after-write and output fluctuation.

Magnetic thin film head, the fabrication method, and magnetic disk

A magnetic disk apparatus includes a magnetic reproducing head portion, and a magnetic recording head including a lower magnetic core and an upper magnetic core having a end portion and a rear portion. The rear portion is formed using a negative resist or an electron beam resist to form a frame for plating above the end portion of the upper magnetic core head.

Manufacturing method of a thin film magnetic head

Disclosed is a magnetic disk apparatus including a magnetic reproducing head portion, and a magnetic recording head including an upper magnetic core having a end portion and a rear portion. As a resist for a frame which is used for forming the rear portion, a negative resist or an electron beam resist is used, whereby the frame is formed without any adverse effect of halation from a coil insulating film. That is, it is possible to manufacture a magnetic recording head in which the rear portion of an upper magnetic core is not emerged at the face opposed to a medium, and hence to obtain a magnetic disk apparatus exhibiting an areal recording density of 5 Gbit/in or more by mounting a magnetic recording/reproducing head including such a magnetic recording head.

A method of fabricating a thin-film magnetic in which a mask pattern in etching a bottom pole is formed of first and second mask films in this order when viewed from the bottom pole, the first mask film is used for defining, by self-alignment, the length of that portion of the side edge of a top pole which is nearly perpendicular to a magnetic gap, the second mask film makes it possible to etch the bottom pole with high dimensional accuracy, a non-magnetic film is formed on the mask pattern having the bottom pole thereunder and the exposed region of a substrate, and the top pole is formed after the mask pattern has been exposed and removed.

Method of fabricating thin-film magnetic head

A process for producing a magnetic head slider with at least one rail having an air bearing surface. The process includes the steps of disposing a non-metallic film on a work surface to be shaped of a magnetic head slider material so as to be in intimate contact with the work surface, patterning the non-metallic film disposed on the work surface into at least one predetermined rail shape, shaping the work surface of the magnetic head slider material utilizing the patterned non-metallic film as a mask, and stripping off the patterned non-metallic film utilized as a mask which remains on the work surface of the slider material so as to provide at least one shaped slider rail of the magnetic head slider.

Process for producing magnetic head slider

In a thin-film magnetic head having a magnetic core (upper magnetic layer), in the electromagnetic conversion section, which are composed of an upper first magnetic film, inorganic insulating film, and an upper second magnetic film, the upper first magnetic film is used as a second wiring for electrical continuity between the coil and input/output terminal. The upper first magnetic film is connected to the center of a coil which is of a single-layer structure. The first upper magnetic film is made of a same material as the coil and is formed simultaneously with the latter. In the region in which an input/output terminal backing is formed, the upper first magnetic film of a second wiring is removed. Thus, the electrical continuity is established between the input/output terminal and the center of the coil. Also, the utilization of the upper first magnetic film as second wiring is applicable to a thin-film magnetic head having a coil of a multi-layer structure.

Thin-film magnetic head having special input/output terminal backing

A thin film magnetic head having two conductor layers provided within a magnetic circuit constituted by a first and a second magnetic member. The magnetic circuit has, at the side to which a recording medium is opposed, a portion where the first and second magnetic members are opposed to each other over a length substantially equal to a gap depth, intervening a non-magnetic gap member therebetween, and a portion ahead thereof where they are connected with each other. The edge of the gap member constitutes an aperture of the magnetic circuit. The thin film magnetic head arranged as above permits a high density recording without reducing its production yield.

Thin film magnetic head and method of manufacture

Disclosed is a thin film magnetic head having a structure wherein the main portion of a coil consists of a copper or copper alloy layer and its upper surface is covered with a thin film mask consisting of titanium, titanium oxide, chromium and/or chromium oxide. The magnetic head of the invention can prevent the occurrence of projecting etching residues at the upper edge portion of the coil and can easily increase the cross-sectional area and the winding density of the coil. Furthermore, when the thin film mask consists of titanium and/or titanium oxide, a titanium diffusion prevention film consisting of chromium, for example, is interposed between the thin film mask and the copper or copper alloy, so that the resistance change of the coil scarcely takes place owing to heat treatment in a production process after the formation of the coil and the head reliability can be further improved.

Thin film magnetic head having an improved coil

Growing community of inventors

Chigasaki, Japan

Harunobu Saito