Canon Kabushiki Kaisha

Hitachi, Ltd.

Harunobu Muto

Yoshinori Nakayama

Kenichi Nagae

Haruhito Ono

Masaki Takakuwa

There is provided a multi-charged beam lens constituted by stacking, via fiber chips serving as insulator members along the optical path of a charged beam, a plurality of electrodes having a charged beam passing region where a plurality of charged beam apertures are formed. The electrodes have shield apertures between the charged beam passing region and the fiber chips. A conductive shield extends through the shield apertures without contacting the electrodes, and cuts off a straight path which connects the charged beam passing region and the fiber chips serving as insulator members. This prevents the influence of charge-up of the insulator members on an electron beam in the multi-charged beam lens.

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Tokyo, Japan

Harunobu Muto