Edwards Japan Limited

Haruki Suzuki

Takashi Kabasawa

Yongwei Shi

A vacuum pump which can reduce a stress generated in a connected part between a rotating body and a rotating shaft is provided. A rotating body is provided having rotor blades provided on an outer periphery of a rotor-blade forming portion, and fastened to the rotor shaft by a bolt, and rotatable with the rotor shaft. At least either one of a fitting hole portion fitted with the rotating shaft and a through hole portion, through which a bolt penetrates, in the rotating body is a stress-reduction target portion, and a groove portion that reduces stress generated in the stress-reduction target portion during rotation of the rotating body is provided.

Vacuum pump and rotating body for vacuum pump

A vacuum pump having excellent exhaust performance is provided. The vacuum pump includes a Siegbahn type exhaust mechanism portionin which a Siegbahn spiral groove portionis provided in at least either rotating discstoor stator discsand, and a Holweck type exhaust mechanism portionin which a thread grooveis provided in at least either a cylindrical portionof a rotating bodyor a threaded spacer, and the Holweck type exhaust mechanism portionis located on the downstream side of the Siegbahn type exhaust mechanism portion. The Holweck type exhaust mechanism portionhas a flow passage depth that is continuously constant at a predetermined depth H, and the Siegbahn type exhaust mechanism portionincludes a region that is continuously constant at the predetermined depth Hfrom a predetermined position.

Vacuum pump

Provided is a vacuum pump regarding which compression can be improved at low costs. Included is a plurality of Siegbahn exhaust mechanisms in which a helical groove is provided to a stator disc. The Siegbahn exhaust mechanisms are provided on both faces of an upstream side and a downstream side of the stator disc. An end portion of the helical groove provided on the upstream side and a start portion of the helical groove provided on the downstream side are situated at least partially overlapping in a circumferential direction. A width of a channel of a switchback portion of the upstream side and the downstream side is equivalent or less than a depth of a channel of the Siegbahn exhaust mechanisms.

Growing community of inventors

Chiba, Japan

Haruki Suzuki