Sumco Corporation

Thk Co., Ltd.

Haruki Shoji

Tetsuhiro Nishide

Junya Suenaga

Kan Yoshitake

Kimitaka Okamoto

Tsutomu Tokairin

Nishide Tetsuhiro

Disclosed herein is an epitaxial growth apparatus for growing an epitaxial layer on a surface of a wafer. The apparatus includes: a chamber in which the wafer is housed; an upper lamp group that includes a plurality of heating lamps arranged in a ring above the chamber; a lower lamp group that includes a plurality of heating lamps provided below the chamber; a reflection member that is provided inside the ring of the upper lamp group, the reflection member having a substantially cylindrical shape; and an additional reflection member that is provided inside the reflection member, the additional reflection member including a reflection surface that is substantially parallel to the surface of the wafer. The additional reflection member is provided in such a way as to close at least part of an opening of a lower end portion of the reflection member.

Epitaxial growth apparatus

A ball joint is manufactured by molding a holder through casting by using a ball as a core and joining a shaft member to the ball after the casting through electric resistance welding. The ball joint includes: the ball; a resin sliding contact member including a first opening portion and a second opening portion that expose a spherical surface of the ball in opposite directions; the holder molded through the casting by using the ball and the resin sliding contact member as a core, the holder being obtained by integrally molding a closing portion that is held in contact with a part of the ball, which projects from the second opening portion of the resin sliding contact member; and the shaft member joined to another part of the ball, which is exposed from the first opening portion of the resin sliding contact member, through the electric resistance welding.

Ball joint and manufacturing method therefor

Growing community of inventors

Tokyo, Japan

Haruki Shoji