Tokyo Electron Limited

Nagoya University

Tokai National Higher Education and Research System

Haruka Suzuki

Hirotaka Toyoda

Masaru Hori

Makoto Sekine

Hitoshi Itoh

A waveguide has a first conductor surface facing toward the interior of the waveguide, a second conductor surface facing toward the interior of the waveguide, and a slot extending from the first conductor surface to the outside of the waveguide. The first conductor surface and the second conductor surface electrically communicate with each other and face each other. The first length in the y direction of the first conductor surface in a cross section perpendicular to the z direction is smaller than the second length in the y direction of the second conductor surface in the cross section perpendicular to the z direction. The first length includes the length in the y direction of the slot in the cross section perpendicular to the z direction. The second length is smaller than the distance between the first conductor surface and the second conductor surface in the x direction.

Plasma generation apparatus

A microwave supply apparatus includes a waveguide, a circulator, and a matcher, a first port of the circulator receives a microwave from an input end. First and second ends of the waveguide are coupled to second and third ports of the circulator, respectively. The matcher is provided between the input end and the first port of the circulator. The waveguide includes a rectangular waveguide having first and second walls facing each other, and third and fourth walls facing each other. A slot hole is formed in the first wall, and the slot hole is provided at a region deviated to the third wall side. The waveguide includes a first ridge portion provided therein. The first ridge portion faces the slot hole, is in contact with the second wall and third wall, and is separated from the first wall and fourth wall.

Microwave supply apparatus, plasma processing apparatus, and plasma processing method

Growing community of inventors

Nagoya, Japan

Haruka Suzuki