Okayama University

Haruhito Uchida

Tatsuyuki Nakatani

Yasuhiro Fujii

Yuichi Imai

Susumu Ozawa

A film formation method is provided with a step for disposing a non-electroconductive long thin tubein a chamberin which the internal pressure thereof is adjustable, generating a plasma inside the long thin tubein a state in which a starting material gas including a hydrocarbon is supplied, and forming a diamond-like carbon film on an inner wall surface of the long thin tube. The long thin tubeis disposed in the chamberin a state in which a discharge electrodeis disposed in one end part of the long thin tubeand the other end part is open. An alternating-current bias is intermittently applied between the discharge electrodeand a counter electrodeprovided so as to be separated from the long thin tube

Growing community of inventors

Okayama, Japan

Haruhito Uchida