Kawasaki Jukogyo Kabushiki Kaisha

Kawasaki Robotics (usa), Inc.

Haruhiko Tan

Masahiko Sumitomo

Avish Ashok Bharwani

Simon Jeyapalan

Tetsuya Yoshida

Hajime Nakahara

Hirohiko Goto

Kazuo Fujimori

Shota Tominaga

Katsuhiro Yamashita

Masaya Yoshida

Ming Zeng

Junichi Sugahara

George Chin

Hiroyuki Yoshida

Jun Kanzaki

Ryota Sakai

Nobuyasu Shimomura

Mu-Kai Lin

A substrate conveying robot includes a hand sensor provided on a substrate holding hand, and a hand circuit substrate provided on the substrate holding hand and connected to the hand sensor, and a serial communication connection is made between a robot controller and the hand circuit substrate through an inside of an arm.

Substrate conveying robot system

A robot system includes a robot that includes a motor, a first storage unit that is provided to correspond to the motor and stores identification information of the motor, a second storage unit that is provided separately from the first storage unit and stores the identification information of the motor, and a control unit that detects whether or not the motor attached to the robot is a motor to which the identification information has been assigned in advance, by comparing the identification information of the motor stored in the first storage unit and the identification information of the motor stored in the second storage unit.

Robot system

A substrate conveying robot includes an arm, a substrate holding hand, a sensor board to which a sensor is electrically connected, and a control board on which a controller is mounted, the control board including a universal connector connectable to different types of the sensor boards.

Substrate conveying robot and substrate conveying robot system

An aligner system includes a motor, a rotating device, a control device, and a sensor. The motor generates a rotational drive force. The rotating deviceis rotated by the rotational drive force generated by the motor, while supporting a wafer. The control device controls rotation of the rotating device, and performs a process of setting a rotational phase of the wafer to a predetermined value. The sensor emits a plurality of light beams traveling in different directions toward an edge of the wafer, and receives the light beams to detect a defect in the edge of the wafer.

Aligner apparatus

A short-circuiting device according includes a short circuit that is electrically connected to a robot, the robot including a robotic arm and at least one motor, the robotic arm including at least one joint shaft that is provided with the respective at least one motor, the short circuit being provided separately from a robot controller configured to control the robot, the short circuit being configured to apply a dynamic brake to each motor.

Short-circuiting device and robot system including the same

A substrate handling apparatus according to one or more embodiments may include: a base, an elevating unit that is connected to the base to freely elevate and lower, an arm that is rotatably connected to the elevating unit, a disk that is provided on the arm, and a hand that is rotatably connected to the arm, wherein in case that the hand is provided on a position to overlap the arm, the disk is provided under the substrate extracted by the hand.

Substrate handling apparatus and method of handling substrate

A transport system includes a robot, sensors (an aligner sensor, a protrusion detecting sensor) and a controller. The robot having a hand which supports a wafer and transports the wafer to an aligner apparatus. The sensor detects the position of the wafer before the robot delivers the wafer to the aligner apparatus while supporting the wafer on the hand. The controller determines the positional deviation of the wafer based on a detection value of the sensor.

Transport system and determination method

A robot according to one or more embodiments may include an arm and a hand. The hand is connected to the arm and supports to convey a wafer. The hand includes a base end portion that is an end of the side connected to an arm, and a distal end portion that is an end of the opposite side of the base end portion. With the hand, a lightened part is formed in at least a part of a first region which is a region of a distal end portion than the center part in the longitudinal direction of the hand.

Robot

A wafer jig according to one or more embodiments may be used for a robot having a hand and a state detector. The hand can transport a wafer. The state detector detects a state of a member holding the wafer at the hand or a state of a negative pressure adsorbing the wafer at the hand. The wafer jig includes an information output part. The information output part outputs information to a hand side via the state detector by changing a detection result of the state detector.

Wafer jig, robot system, communication method, and robot teaching method

A diagnostic system of a substrate transfer hand including a base part coupled to a hand tip portion of a robot arm and a substrate holding part coupled to the base part to hold a substrate, includes a camera which is secured to the base part and takes an image of the substrate holding part; and a diagnostic device which obtains image information of the image taken by the camera and diagnoses normality of the substrate holding part based on the image information.

Diagnostic system of substrate transfer hand

A robot system includes: a robot; a portable operation terminal having a teaching function; and a robot controller having operation modes including a teaching mode and another operation mode different from the teaching mode, the teaching mode being an operation mode for teaching a motion to the robot through the portable operation terminal. The robot controller is configured to: detect electrical connection and electrical disconnection between the robot controller and the portable operation terminal; change an operation mode in which to operate the robot to the teaching mode when detecting the connection between the robot controller and the portable operation terminal; and change the operation mode in which to operate the robot to the other operation mode different from the teaching mode when detecting the disconnection between the robot controller and the portable operation terminal.

Robot system and robot controller

An aligner apparatus according to one or more embodiments may include a first rotating base, a second rotating base, and a detection apparatus. The first rotating base on which a wafer placed thereon rotates around a first rotation axis line. The second rotating base on which a wafer placed thereon rotates around a second rotation axis whose position is different from that of the first rotation axis line. The detection apparatus includes one sensor for detecting the edge of the wafer, and the detection range of the sensor includes the edge of the wafer placed on the first rotating base and the edge of the wafer placed on the second rotating base, and detects the edges of the two wafers.

Aligner apparatus and alignment method

A housing includes: a box-shaped main body portion accommodating an electronic circuit substrate and including an opening portion; a lid portion covering the opening portion so as to be able to open or close the opening portion; a jumper detachably attached to the electronic circuit substrate; a window portion different from the opening portion, the window portion being opposed to the jumper and being open at the main body portion; and a cover portion covering the window portion so as to be able to open or close the window portion.

Housing

A control device of robot includes: image data acquirer configured to acquire image data taken by camera, image data including a teaching substrate and a substrate placing portion of a hand, the teaching substrate arranged as a teaching target at substrate target position; a virtual substrate information generator configured to generate information of a virtual substrate virtually arranged at the substrate placing portion of the hand in image data of the camera; distance information calculator configured to calculate distance information from substrate placing portion to the teaching substrate based on image data of the camera; operation control unit configured to control operation of robot arm based on distance information from the substrate placing portion to the teaching substrate such that the virtual substrate coincides with the teaching substrate; and storage unit configured to store, as teaching data, position of the hand when the virtual substrate coincides with the teaching substrate.

Robot, control device of robot, and method of teaching position of robot

A control device of a robot includes: an image data acquirer acquiring image data taken by a camera, the image data including a hand teaching substrate and substrate placing portion, the teaching substrate arranged as a teaching target at a substrate target position; a virtual substrate information generator generating information of a virtual substrate virtually arranged at the hand substrate placing portion in the image data; an operating unit receiving an input and generate operation information corresponding to the input; a screen display unit displaying an image of the teaching substrate and an image of the virtual substrate on a screen; a robot operation control unit controlling an operation of the robot arm in accordance with the operation information; and a teaching data record unit storing, as teaching data, a position of the hand when the virtual substrate has coincided with the teaching substrate.

Growing community of inventors

Kobe, Japan

Haruhiko Tan