Mitutoyo Corporation

Academia Sinica

Bundesrepublik Deutschland, Endvertreten Durch Den Präsidenten Der Physikalisch-Technischen Bundesanstalt

Bundesrepublik Deutschland, Endvertreten Durch Den Prasidenten Der Physikalisch-technischen Bundesan

Hartmut Illers

Kazuhiko Hidaka

Akinori Saito

Ing-Shouh Hwang

En-Te Hwu

Hans-Ulrich Danzebrink

Hans Ulrich Danzebrink

Hans Ullrich Danzebrink

Hans Ullrich Danzenbrink

DrHans-Ulrich Danzebrink

Kazuhiko c/o Mitutoyo Research Center Europe Bv Hidaka

A system includes a displacement sensor, an actuator connected to the displacement sensor, and a feedback unit. The displacement sensor is configured to measure at least one of a relative position and a relative orientation between the displacement sensor and the target object. The feedback unit receives a signal from the displacement sensor related to the measured relative position or relative orientation and controls the actuator to move the displacement sensor on the basis of variations in the received signal arising due to a change in environmental conditions.

Alignment and anti-drift mechanism

A method of actuating a system comprising a movable component and an actuator configured to move the movable component comprises providing a control signal representative of a desired motion of the movable component. The control signal is supplied to one or more resonators. Each of the one or more resonators has a mode of oscillation representative of at least one elastic mode of oscillation of the system. The control signal is modified by subtracting from the control signal a signal representative of a response of the one or more resonators to the control signal. The actuator is operated in accordance with the modified control signal. Thus, undesirable elastic oscillations of the system which might occur if the system were operated with the original control system can be reduced.

Method of actuating a system, apparatus for modifying a control signal for actuation of a system and method of tuning such an apparatus

A method of detecting a movement of a measuring probe provided between an objective lens adapted to image an object plane on a predetermined image plane and the object plane is disclosed. Additionally, a measuring instrument comprising an objective lens and a measuring probe is disclosed. An input beam of light is split into a measurement beam and a reference beam. The measurement beam is focused on a reverse focal plane of the objective lens such that the measurement beam is collimated by the objective lens. The collimated measurement beam is reflected at the measuring probe. The reflected measurement beam is directed towards the objective lens such that the objective lens focuses the reflected measurement beam on the reverse focal plane. The reflected measurement beam is collimated. The collimated reference beam and the reference beam are superimposed to form a superimposed beam and an interference between the reflected measurement beam and the reference beam is detected.

Method of detecting a movement of a measuring probe and measuring instrument

Growing community of inventors

Hahausen, Germany

Hartmut Illers