Carl-zeiss-smt Ag

Hartmut Brandenburg

Hubert Holderer

Rolf Freimann

Alexander Kohl

Bernd Doerband

Frank Schillke

Werner Lang

Bernhard Fellner

Hans-Guenther Sachs

A method of manufacturing an optical system comprises assembling an optical element on a mounting frame thereof. The mounting frame is disposed on a rotary table having an axis of rotation, and the mounting frame is adjusted such that a predefined axis of symmetry thereof is parallel to the axis of rotation. The optical element is placed on the mounting frame, and an interferometric measurement of a surface of the optical element is performed. The interferometric measurement is analyzed to arrange the optical element relative to the mounting frame such that a predefined axis of the optical element is parallel to the axis of rotation.

Method of manufacturing an optical system

The invention relates to an objective, particularly a projection objective for use in semiconductor lithography, comprising optical elements such as lenses () and mirrors (). According to the invention, at least a portion of the optical elements () is provided with a reflective surface outside of the optically active area serving as the reference surface () for a the optical element inside the objective ().

Objective, particularly a projection objective for use in semiconductor lithography

Growing community of inventors

Lauchheim, Germany

Hartmut Brandenburg