Lam Research Ag

Sez Ag

Harry Sax

Rainer Obweger

Alexander Lippert

Disclosed is a method and a respective apparatus for ultrasonic wet treatment of a plate-like article, which comprises: bringing a solid element, which is connected to a transducer in close proximity to a surface of a plate-like article so that a gap is formed between the solid element and the plate-like article, the gap having a distance dbetween 0.1 mm and 5 mm, dispensing liquid for filling the gap between the solid element and the plate-like article, and detecting ultrasonic waves and/or controlling the distance d, by measuring the distance d, comparing the measured distance with a desired distance dand adjusting the distance accordingly.

Apparatus and method for ultrasonic wet treatment of plate-like articles

The invention relates to a method for the treatment of disk-like objects with one first liquid and at least one second liquid at least in a defined edge region of a disk-like object.

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Villach, Austria

Harry Sax