Globalfoundries U.S. Inc.

Harry Cox

Sarah Huffsmith Knickerbocker

Jorge A Lubguban

Michael David Webster

Ian Melville

Brittany Hedrick

Structures for a photonics chip that include a cavity or groove and methods of forming same. The structure comprises a semiconductor substrate including a first opening, a back-end-of-line stack on the semiconductor substrate, and a dielectric layer on the back-end-of-line stack. The back-end-of-line stack includes a pad, and the dielectric layer includes a second opening that extends to the pad. The structure further comprises an electrical interconnect inside the second opening in the dielectric layer. The electrical interconnect includes a sidewall that is separated in a lateral direction from the dielectric layer by a gap.

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Rifton, NY, United States of America

Harry Cox