Carl-zeiss-smt Ag

Other

Harry Bauer

Christoph Zaczek

Eric Eva

Hans-Jochen Paul

Matthias Heller

Thure Boehm

Jens Ullmann

Patrick Scheible

Karl-Heinz Schuster

Michael Gerhard

Burkhard Speit

Peter Vogt

Ralf Kuschnereit

Ewald Moersen

Michael Thier

Hexin Wang

Joerg Kandler

Hans-Josef Paus

Frank Richter

Bernhard Wergl

Dietrich Klaassen

J&uuml;rgen Hartmaier

Jens Spanuth

An optical component and a coating system for coating substrates for optical components with essentially rotationally symmetric coatings, the system having a planetary-drive system () that has a rotating planet carrier () and several planets (), each of which carries a single substrate, that corotate both with the planet carrier and with respect to the primary carrier. In one embodiment a set of stationary first masks () that allow controlling the radial variation in physical film thickness is arranged between a source () of material situated beneath the planets and the substrates. A set of second masks that mask off evaporation angles exceeding a limiting evaporation or incidence angle (&#x3b2; max) for every substrate also corotate with the primary carrier (), which allows depositing coatings having a prescribed radial film-thickness distribution and a virtually constant density of the coating material over their full radial extents for relatively low, and only slightly varying, evaporation angles.

Optical component and coating system for coating substrates for optical components

In a device for reducing the peak power of a pulsed laser light source, in particular for a projection exposure system, there is arranged in the beam path () at least one beam splitter apparatus () by means of which a detour line (or) is produced, via reflecting components (or) for at least one partial beam () with subsequent recombination at a beam recombining element (or) with the other partial beam or beams (or) to form a total beam.

Device for reducing the peak power of a pulsed laser light source

A method for coating substrates () for optical components with essentially rotationally symmetric coatings employs a coating system equipped with a planetary-drive system () that has a rotating planet carrier () and several planets (), each of which carries a single substrate, that corotate both with the planet carrier and with respect to the primary carrier. In one embodiment a set of stationary first masks () that allow controlling the radial variation in physical film thickness is arranged between a source () of material situated beneath the planets and the substrates. A set of second masks that mask off evaporation angles exceeding a limiting evaporation or incidence angle (&#x3b2; max) for every substrate also corotate with the primary carrier (), which allows depositing coatings having a prescribed radial film-thickness distribution and a virtually constant density of the coating material over their full radial extents for relatively low, and only slightly varying, evaporation angles.

Method and coating system for coating substrates for optical components

A method of making a fracture-resistant large-size calcium fluoride single crystal is described, which is suitable for an optical component for radiation in the far UV range. The calcium fluoride raw material for the single crystal is first melted and subsequently solidified by cooling the melt to form a single crystal. However the calcium fluoride raw material is doped with from 1 to 250, preferably 1 to 100, ppm of strontium, preferably added as strontium fluoride, and contains from 1 to 10 ppm of sodium as well as up to 100 ppm of other impurities.

Method of making a fracture-resistant calcium fluoride single crystal and its use

A device is used to hold an optical element, in particular one made of a crystalline material, in particular of CaF , while the optical element is being coated, in particular by the vapor-deposition of at least one functional layer in a vacuum coating plant. The latter has a device for mounting the optical element, it being possible for the optical element to be heated in the vacuum coating plant via suitable radiation, in particular infrared radiation. An intermediate element which has a lower thermal absorption than the device for mounting the optical element is arranged between the device for mounting the optical element and the optical element.

Holding device for an optical element made of a crystalline material

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Aalen, Germany

Harry Bauer