Qorvo US, Inc.

Harold Isom

Christo Pavel Bojkov

Michael Roberg

Zhi-Qi Li

RF devices, and more particularly RF devices with photo-imagable polymers for high frequency enhancements and related methods are disclosed. High frequency enhancements are realized by providing air cavities registered with one or more operating portions of RF devices. The air cavities are formed by photo-imagable polymer structures that provide separation from high dielectric constant materials associated with sealing materials, such as overmold materials, that are typically used for environmental and/or mechanical protection in RF devices. Related methods are disclosed that include forming the photo-imagable polymer structures and corresponding air cavities through various lamination and patterning of photo-imagable polymer layers. Further radiation hardening steps are disclosed that may be applied to the photo-imagable polymer structures after air cavities are formed to promote improved structural integrity of the air cavities during subsequent fabrication steps and during operation of the RF devices.

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Plano, TX, United States of America

Harold Isom