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Kulite Semiconductor Products, Inc.

Harold Bernstein

Anthony D Kurtz

Joseph R Mallon

Richard A Weber

James William Bice

Charles L Gravel

There is disclosed an apparatus and a technique for shunt calibration of a Wheatstone bridge array independent of temperature. The structure involves a side completion half bridge array which has two temperature sensitive resistors as semiconductor strain gages forming one arm of the bridge and two temperature insensitive resistors forming the other arm of the bridge. An input voltage is applied to two opposite terminals of the bridge via equal span resistors and an output is taken between the common terminals of each of the bridge arms. A calibration resistor is positioned to shunt a span resistor and a temperature insensitive resistor to provide a calibrated output voltage of a magnitude independent of temperature.

Apparatus and methods for the shunt calibration of semiconductor strain

A glass or other dielectric backed transducer structure is formed by utilizing a series of processes including at least one electrostatic bond. The processes enable one to bond a semiconductor wafer to a dielectric as a glass wafer. Then by selectively removing certain conductively semiconductor, one obtains a 'thin ribbon' piezoresistive bridge secured to a thin glass wafer. The resultant structure is entirely unanticipated by the prior art. A glass part is also formed by electrostatically bonding a glass wafer to a semiconductor wafer, polishing the glass to a desired depth, masking the polished glass layer according to a desired pattern representative of the glass part, etching away all the glass except the desired pattern, and thence removing all the semiconductor.

Method for fabricating glass-backed transducers and glass-backed

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Hillsdale, NJ, United States of America

Harold Bernstein