Applied Materials, Inc.

Hari Kishore Ambal

Jianhua Zhou

Uwe Paul Haller

Todd J Egan

Edward W Budiarto

Abraham Ravid

Mitchell DiSanto

Karen Lingel

Methods and apparatus for controlling the temperature of multi-zone heater in a process chamber are provided herein. In some embodiments, a method is provided to control a multi-zone heater disposed in a substrate support, wherein the multi-zone heater has a first zone and a second zone. In some embodiments, the method may include measuring a current drawn by the first zone at a first time; measuring a voltage drawn by the first zone at the first time; calculating the resistance of the first zone based upon the measured current and voltage drawn by the first zone at the first time; determining a temperature of the first zone based upon a predetermined relationship between the resistance and the temperature of the first zone; and adjusting the temperature of the first zone in response to the temperature determination.

Methods and apparatus for controlling temperature of a multi-zone heater in a process chamber

A metrology system has an elongate stationary camera pixel array facing a workpiece transit path of a robot with an field of view corresponding to a workpiece diameter and extending transverse to the transit path portion, and a stationary elongate light emitting array generally parallel to the pixel array. An image control processor causes the camera to capture successive image frames while the robot is moving the workpiece through the transit path.

Metrology system for imaging workpiece surfaces at high robot transfer speeds

Methods and apparatus for controlling temperature of a multi-zone heater in an process chamber

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San Jose, CA, United States of America

Hari Kishore Ambal