Vat Holding Ag

Harald Sonderegger

Martin Netzer

Daniel Seitz

Leo Marugg

Wolfgang Madlener

A valve system having a vacuum valve with a valve seat having a valve opening defining an opening axis and a first sealing surface around the valve opening, a valve closure having a second sealing surface and a drive unit coupled to the valve closure. A control and regulating unit preforming a pre-regulating step and a regulating step for the valve closure in a regulating cycle, the pre-regulating step moves the valve closure to a defined position and the regulating step the closure position is varied based on a determined control variable and a target value. The regulating and control unit updates at least during a part of the regulating cycle and a regulating profile is derived, the regulating profile is compared with a reference regulating profile and a regulating deviation is derived, an adapted pre-regulating position is provided as the actual pre-regulating position for the regulating cycle.

Optimized pressure regulation for and with a vacuum valve

A vacuum valve, having a valve seat including a valve opening (axis (A)), and a first sealing surface around the valve opening and defines a first sealing plane (E), having a valve disk with a second sealing surface corresponding to the first sealing surface and defining a second sealing plane (E), additionally having a first coupling element, connected to the valve disk and comprising a receiving means and a drive unit coupled with the first coupling element and is configured to provide the valve disk adjustable from an open position to a closed position. The drive unit and the valve disk are configured to provide a fine control position, wherein the valve disk is tilted relative to the valve seat where Eand Eenclose a defined angle (&#x3b1;), and the seal abuts fully against one of the two sealing surfaces and in part against the other sealing surface.

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Batschuns, Austria

Harald Sonderegger