Gkss-forschungszentrum Geesthacht Gmbh

Gesellschaft Fur Kernenergieverwertung in Schiffbau Und Schiffahrt Mbh

Ckss Forschungszentrum Geesthacht Gmbh

Harald Schneider

Joachim Knoth

Heinrich Schwenke

Rainer Marten

Herbert Rosomm

Ulrich Weisbrod

A method and arrangement for analyzing specimens pursuant to the X-ray fluorescence analysis method utilizing a beam detector to detect a secondary beam that originates from the specimen that is to be analyzed and upon which is directed a primary X-ray beam, the path of which is adjustable in at least one axis of freedom. The surface of a specimen holder on which the specimen is placed is disposed parallel to, and at a defined distance from, a reference plane at which the primary beam is reflected under total reflection conditions. Subsequently, the path of the primary beam is adjusted relative to the reference plane while simultaneously detecting, with a detector, the radiation spectrum of the secondary beam of the specimen. At a predetermined energy level of the primary beam, a secondary beam intensity maximum, to which is assigned a specific reference angle, is determined.

Method and arrangement for analyzing specimens pursuant to the x-ray

The present invention relates to an arrangement for the non-destructive measurement of metal traces in the surface of material samples in which the surface is irradiated with X-ray radiation and a detector, fastened above the material sample, spectrometrically examines the fluorescent radiation emanating from the material sample. Metal impurities are detected in the surface of, for example, silicon wafers down to about 10.sup.11 atoms/cm.sup.2, on-line, with the wafers being free from contamination by the measuring process. It is possible to sweep the entire surface area of wafers having a diameter up to about 150 mm at the locations fixed by the respective standards. The X-ray radiation directed onto the surface of the material sample by means of an adjustable X-ray source, the divergence of the exciting X-ray radiation being limited by two aperture members, the aperture members being disposed in a quartz body serving as an optical bench. A positioning device is provided with which the material sample can be pressed against a surface of the quartz body.

Arrangement for the non-destructive measurement of metal traces

An apparatus for the quantitative in-line X-ray fluorescence analysis of rries by means of a radioactive preparation, e.g. Cd-109, and an X-ray fluorescence detector. The apparatus comprises a substantially vertical measuring tube with inlet and outlet for the slurries to be investigated, and a measuring station. Above the measuring station which contains the radioactive preparations and the fluorescence detector there is provided a filling level control which controls the state of opening of the outlet.

Apparatus for quantitative in-line X-ray fluorescence analysis of

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Geesthacht, Germany

Harald Schneider