Carl-zeiss-smt Ag

Harald Schink

Alexander Hirnet

Guenter Scheible, Legal Representative

Toralf Gruner

Karl-Heinz Schuster

Ulrich Loering

Christoph Zaczek

Alexandra Pazidis

Markus Brotsack

Karl-Stefan Weissenrieder

Michael Lill

Sigrid Scheible, Legal Representative

An optical component has a substrate, on which at least one curved substrate surface is formed that defines an optical axis of the optical component, wherein the substrate surface is coated with a multilayer coating that is active in the ultraviolet region at a design wavelength &#x3bb;and includes a first layer, applied to the substrate surface, made from a first dielectric material and at least one second layer, applied to the first layer, made from a second dielectric material. The substrate consists essentially of a crystal material that has an axially parallel crystal direction, running parallel to the optical axis, and edge crystal directions perpendicular to edge regions of the curved substrate surface. An angle between the axially parallel crystal direction and the edge crystal directions is at least 17&#xb0;, and the first layer has an essentially untextured layer structure. An anisotropy, caused by the substrate structure, in the optical properties of the multilayer coating can thereby be avoided.

Monocrystalline optical component with curved surface and multilayer coating

In a projection objective provided for imaging a pattern arranged in an object plane of the projection objective into an image plane of the projection objective with the aid of an immersion medium arranged between a last optical element of the projection objective in the light path and the image plane, the last optical element has a transparent substrate and a protective layer system that is fitted to the substrate, is provided for contact with the immersion medium and serves for increasing the resistance of the last optical element to degradation caused by the immersion medium.

Projection objective for immersion lithography

Growing community of inventors

Aalen, Germany

Harald Schink